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Comprehensive investigation of defects in highly perfect silicon single crystals

We used X-ray diffraction method of total rocking curves and nondestructive direct observation techniques (atomic force and scanning electron microscopies) to quantitatively determine the defect characteristics (radii and concentrations) for the main types of defects in Czochralski-grown silicon sin...

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Bibliographic Details
Main Authors: Prokopenko, I.V., Kislovskii, E.N., Olikhovskii, S.I., Tkach, V.M., Lytvyn, P.M., Vladimirova, T.P.
Format: Article
Language:English
Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2000
Series:Semiconductor Physics Quantum Electronics & Optoelectronics
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/121174
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