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Obtaining silicon carbide via chemical vapor, plasma-chemical and sublimation methods
In the present paper the results of studies on obtaining silicon carbide via chemical gas phase, plasma-chemical and sublimation methods are described. The thermodynamic analysis of chemical reactions of silicon carbide in the presence of hydrogen and without was provided. Was found that, without fr...
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Main Authors: | , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2017
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Series: | Вопросы атомной науки и техники |
Subjects: | |
Online Access: | http://dspace.nbuv.gov.ua/handle/123456789/122172 |
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