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Obtaining silicon carbide via chemical vapor, plasma-chemical and sublimation methods

In the present paper the results of studies on obtaining silicon carbide via chemical gas phase, plasma-chemical and sublimation methods are described. The thermodynamic analysis of chemical reactions of silicon carbide in the presence of hydrogen and without was provided. Was found that, without fr...

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Bibliographic Details
Main Authors: Zhuravlov, А.Yu., Hovanskiy, N.А., Khizhnyak, D.A., Shirokov, B.M., Semenov, N.A., Shijan, А.V., Strigunovskiy, S.V., Yevsiukov, A.I., Shevtsov, A.B., Nazarenko, E.A., Pilipenko, N.N.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2017
Series:Вопросы атомной науки и техники
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Online Access:http://dspace.nbuv.gov.ua/handle/123456789/122172
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