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Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering

Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering

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Bibliographic Details
Main Authors: Zayats, M.S., Boiko, V.G., Gentsar, P.O., Vuichyk, M.V., Lytvyn, O.S., Stronski, A.V.
Format: Article
Language:English
Published: НТК «Інститут монокристалів» НАН України 2010
Series:Functional Materials
Subjects:
Characterization and properties
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/135183
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http://dspace.nbuv.gov.ua/handle/123456789/135183

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