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Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering

Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering

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Bibliographic Details
Main Authors: Zayats, M.S., Boiko, V.G., Gentsar, P.O., Vuichyk, M.V., Lytvyn, O.S., Stronski, A.V.
Format: Article
Language:English
Published: НТК «Інститут монокристалів» НАН України 2010
Series:Functional Materials
Subjects:
Characterization and properties
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/135183
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spelling irk-123456789-1351832018-06-15T03:04:02Z Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering Zayats, M.S. Boiko, V.G. Gentsar, P.O. Vuichyk, M.V. Lytvyn, O.S. Stronski, A.V. Characterization and properties 2010 Article Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering / M.S. Zayats, V.G. Boiko, P.O. Gentsar, M.V. Vuichyk, O.S. Lytvyn, A.V. Stronski // Functional Materials. — 2010. — Т. 17, № 2. — С. 209-212. — Бібліогр.: 11 назв. — англ. 1027-5495 http://dspace.nbuv.gov.ua/handle/123456789/135183 en Functional Materials НТК «Інститут монокристалів» НАН України
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
language English
topic Characterization and properties
Characterization and properties
spellingShingle Characterization and properties
Characterization and properties
Zayats, M.S.
Boiko, V.G.
Gentsar, P.O.
Vuichyk, M.V.
Lytvyn, O.S.
Stronski, A.V.
Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
Functional Materials
format Article
author Zayats, M.S.
Boiko, V.G.
Gentsar, P.O.
Vuichyk, M.V.
Lytvyn, O.S.
Stronski, A.V.
author_facet Zayats, M.S.
Boiko, V.G.
Gentsar, P.O.
Vuichyk, M.V.
Lytvyn, O.S.
Stronski, A.V.
author_sort Zayats, M.S.
title Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
title_short Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
title_full Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
title_fullStr Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
title_full_unstemmed Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
title_sort optical properties of aln/n-si(111) films obtained by method of hf reactive magnetron sputtering
publisher НТК «Інститут монокристалів» НАН України
publishDate 2010
topic_facet Characterization and properties
url http://dspace.nbuv.gov.ua/handle/123456789/135183
citation_txt Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering / M.S. Zayats, V.G. Boiko, P.O. Gentsar, M.V. Vuichyk, O.S. Lytvyn, A.V. Stronski // Functional Materials. — 2010. — Т. 17, № 2. — С. 209-212. — Бібліогр.: 11 назв. — англ.
series Functional Materials
work_keys_str_mv AT zayatsms opticalpropertiesofalnnsi111filmsobtainedbymethodofhfreactivemagnetronsputtering
AT boikovg opticalpropertiesofalnnsi111filmsobtainedbymethodofhfreactivemagnetronsputtering
AT gentsarpo opticalpropertiesofalnnsi111filmsobtainedbymethodofhfreactivemagnetronsputtering
AT vuichykmv opticalpropertiesofalnnsi111filmsobtainedbymethodofhfreactivemagnetronsputtering
AT lytvynos opticalpropertiesofalnnsi111filmsobtainedbymethodofhfreactivemagnetronsputtering
AT stronskiav opticalpropertiesofalnnsi111filmsobtainedbymethodofhfreactivemagnetronsputtering
first_indexed 2023-10-18T21:08:39Z
last_indexed 2023-10-18T21:08:39Z
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