Structure and mechanical stresses in TaSi₂/Si multilayer
The structure, construction and mechanical stresses of the TaSi₂/Si multilayer manufactured by magnetron sputtering on the heated substrates were studied in the initial state and after thermal annealing. Deposition of multilayers is accompanied by formation of compressive mechanical stress. Reductio...
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| Дата: | 2018 |
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| Автори: | , , , , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
НТК «Інститут монокристалів» НАН України
2018
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| Назва видання: | Functional Materials |
| Теми: | |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/157428 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Structure and mechanical stresses in TaSi₂/Si multilayer / A.Yu. Devizenko, I.A. Kopylets, V.V. Kondratenko, Y.P. Pershyn, I.Y. Devizenko, E.N. Zubarev, B.A. Savitskiy // Functional Materials. — 2018. — Т. 25, № 4. — С. 729-735. — Бібліогр.: 12 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
irk-123456789-157428 |
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dspace |
| spelling |
irk-123456789-1574282019-06-21T01:29:20Z Structure and mechanical stresses in TaSi₂/Si multilayer Devizenko, A.Yu. Kopylets, I.A. Kondratenko, V.V. Pershyn, Y.P. Devizenko, I.Y. Zubarev, E.N. Savitskiy, B.A. Characterization and properties The structure, construction and mechanical stresses of the TaSi₂/Si multilayer manufactured by magnetron sputtering on the heated substrates were studied in the initial state and after thermal annealing. Deposition of multilayers is accompanied by formation of compressive mechanical stress. Reduction of mechanical stresses in the multilayers by increasing of the substrate temperature and after thermal annealing was observed. The thickness of the multilayers and the annealing temperature at which ones separated from the substrate were shown. Thermal annealing is accompanied by changes of the multilayer construction and structure of layers. The deposition of depth graded multilayers with layer thickness distribution according to the Fresnel zone plate law has been performed. 2018 Article Structure and mechanical stresses in TaSi₂/Si multilayer / A.Yu. Devizenko, I.A. Kopylets, V.V. Kondratenko, Y.P. Pershyn, I.Y. Devizenko, E.N. Zubarev, B.A. Savitskiy // Functional Materials. — 2018. — Т. 25, № 4. — С. 729-735. — Бібліогр.: 12 назв. — англ. 1027-5495 DOI:https://doi.org/10.15407/fm25.04.729 http://dspace.nbuv.gov.ua/handle/123456789/157428 en Functional Materials НТК «Інститут монокристалів» НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| topic |
Characterization and properties Characterization and properties |
| spellingShingle |
Characterization and properties Characterization and properties Devizenko, A.Yu. Kopylets, I.A. Kondratenko, V.V. Pershyn, Y.P. Devizenko, I.Y. Zubarev, E.N. Savitskiy, B.A. Structure and mechanical stresses in TaSi₂/Si multilayer Functional Materials |
| description |
The structure, construction and mechanical stresses of the TaSi₂/Si multilayer manufactured by magnetron sputtering on the heated substrates were studied in the initial state and after thermal annealing. Deposition of multilayers is accompanied by formation of compressive mechanical stress. Reduction of mechanical stresses in the multilayers by increasing of the substrate temperature and after thermal annealing was observed. The thickness of the multilayers and the annealing temperature at which ones separated from the substrate were shown. Thermal annealing is accompanied by changes of the multilayer construction and structure of layers. The deposition of depth graded multilayers with layer thickness distribution according to the Fresnel zone plate law has been performed. |
| format |
Article |
| author |
Devizenko, A.Yu. Kopylets, I.A. Kondratenko, V.V. Pershyn, Y.P. Devizenko, I.Y. Zubarev, E.N. Savitskiy, B.A. |
| author_facet |
Devizenko, A.Yu. Kopylets, I.A. Kondratenko, V.V. Pershyn, Y.P. Devizenko, I.Y. Zubarev, E.N. Savitskiy, B.A. |
| author_sort |
Devizenko, A.Yu. |
| title |
Structure and mechanical stresses in TaSi₂/Si multilayer |
| title_short |
Structure and mechanical stresses in TaSi₂/Si multilayer |
| title_full |
Structure and mechanical stresses in TaSi₂/Si multilayer |
| title_fullStr |
Structure and mechanical stresses in TaSi₂/Si multilayer |
| title_full_unstemmed |
Structure and mechanical stresses in TaSi₂/Si multilayer |
| title_sort |
structure and mechanical stresses in tasi₂/si multilayer |
| publisher |
НТК «Інститут монокристалів» НАН України |
| publishDate |
2018 |
| topic_facet |
Characterization and properties |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/157428 |
| citation_txt |
Structure and mechanical stresses in TaSi₂/Si multilayer / A.Yu. Devizenko, I.A. Kopylets, V.V. Kondratenko, Y.P. Pershyn, I.Y. Devizenko, E.N. Zubarev, B.A. Savitskiy // Functional Materials. — 2018. — Т. 25, № 4. — С. 729-735. — Бібліогр.: 12 назв. — англ. |
| series |
Functional Materials |
| work_keys_str_mv |
AT devizenkoayu structureandmechanicalstressesintasi2simultilayer AT kopyletsia structureandmechanicalstressesintasi2simultilayer AT kondratenkovv structureandmechanicalstressesintasi2simultilayer AT pershynyp structureandmechanicalstressesintasi2simultilayer AT devizenkoiy structureandmechanicalstressesintasi2simultilayer AT zubareven structureandmechanicalstressesintasi2simultilayer AT savitskiyba structureandmechanicalstressesintasi2simultilayer |
| first_indexed |
2023-05-20T17:52:06Z |
| last_indexed |
2023-05-20T17:52:06Z |
| _version_ |
1796154277468569600 |