Digital processing of optical emission spectra of magnetron sputtering plasma system

• Main Authors: Afanasіeva, I.A., Afanasiev, S.N., Azarenkov, N.A., Bobkov, V.V., Gritsyna, V.V., Logachev, Yu.E., Okseniuk, I.I., Skrypnyk, A.A., Shevchenko, D.I., Chornous, V.M.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2019
• Series: Вопросы атомной науки и техники
• Subjects: Physics of radiotechnology and ion-plasma technologies
• Online Access: http://dspace.nbuv.gov.ua/handle/123456789/194956

To solve the actual problem of the analysis of the sputtered particles radiation during coating deposition in a magnetron sputtering system, a digital technique was proposed for processing the emission spectra of the discharge plasma. A graphic OSA application has been created, which allows obtainin...