Radiation-induced effects in silicon
Results of complex studies of the structural properties of silicon irradiated with light ions of megaelectronvolt energies by fluences greater than 10¹⁶ cm⁻² are presented. It was found that during irradiation under conditions of large energy release in thin layer of crystal, the favorable condition...
Збережено в:
| Дата: | 2019 |
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| Автори: | , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2019
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| Назва видання: | Вопросы атомной науки и техники |
| Теми: | |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/195210 |
| Теги: |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Radiation-induced effects in silicon / ИОФамилия // Problems of atomic science and technology. — 2019. — № 5. — С. 44-48. — Бібліогр.: 20 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| Резюме: | Results of complex studies of the structural properties of silicon irradiated with light ions of megaelectronvolt energies by fluences greater than 10¹⁶ cm⁻² are presented. It was found that during irradiation under conditions of large energy release in thin layer of crystal, the favorable conditions can be created for the controlled introduction of structural defects and the appearance of the effects of ordering and long-range. The possibility of layer-by-layer modification of the properties of silicon at depths up to 780 μm under irradiation with ions was established that can be used to provide the actual needs of micro- and nanoelectronics. |
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