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Structural-phase transformations in magnetron deposited films of Ti-Zr-Ni systems during annealing in vacuum

Structural-phase transformations in magnetron deposited films of Ti-Zr-Ni systems during annealing in vacuum

Structural and phase changes in thin films obtained by magnetron sputtering of a target with the composition Ti41Zr38.3Ni20.7 (at.%) were studied under isothermal vacuum annealing in the temperature range from 400 to 800 °C. The boundaries of the thermal stability of the phases have been determined....

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Bibliographic Details
Main Authors: Malykhin, S.V., Kondratenko, V.V., Kopylets, I.A., Bogdanov, Yu.S., Surovitsky, S.V., Borisova, S.S., Shipkova, I.G.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2022
Series:Вопросы атомной науки и техники
Subjects:
Pure materials and vacuum technologies
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/195827
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http://dspace.nbuv.gov.ua/handle/123456789/195827

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