Structural-phase transformations in magnetron deposited films of Ti-Zr-Ni systems during annealing in vacuum

• Main Authors: Malykhin, S.V., Kondratenko, V.V., Kopylets, I.A., Bogdanov, Yu.S., Surovitsky, S.V., Borisova, S.S., Shipkova, I.G.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2022
• Series: Вопросы атомной науки и техники
• Subjects: Pure materials and vacuum technologies
• Online Access: http://dspace.nbuv.gov.ua/handle/123456789/195827

Structural and phase changes in thin films obtained by magnetron sputtering of a target with the composition Ti41Zr38.3Ni20.7 (at.%) were studied under isothermal vacuum annealing in the temperature range from 400 to 800 °C. The boundaries of the thermal stability of the phases have been determined. Coatings consisting of a single icosahedral quasicrystalline phase, as well as films consisting of the 2/1 crystal-approximant phase were obtained. The features of the phase transformation of a quasicrystal into an approximant crystal were investigated, and the activation energy of this transformation was determined at a level of 94 kJ/mol. The dependence of the degree of phase transformation on the temperature and duration of annealing has been established.