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Structural-phase transformations in magnetron deposited films of Ti-Zr-Ni systems during annealing in vacuum

Structural-phase transformations in magnetron deposited films of Ti-Zr-Ni systems during annealing in vacuum

Structural and phase changes in thin films obtained by magnetron sputtering of a target with the composition Ti41Zr38.3Ni20.7 (at.%) were studied under isothermal vacuum annealing in the temperature range from 400 to 800 °C. The boundaries of the thermal stability of the phases have been determined....

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Main Authors: Malykhin, S.V., Kondratenko, V.V., Kopylets, I.A., Bogdanov, Yu.S., Surovitsky, S.V., Borisova, S.S., Shipkova, I.G.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2022
Series:Вопросы атомной науки и техники
Subjects:
Pure materials and vacuum technologies
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/195827
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spelling irk-123456789-1958272023-12-07T12:52:42Z Structural-phase transformations in magnetron deposited films of Ti-Zr-Ni systems during annealing in vacuum Malykhin, S.V. Kondratenko, V.V. Kopylets, I.A. Bogdanov, Yu.S. Surovitsky, S.V. Borisova, S.S. Shipkova, I.G. Pure materials and vacuum technologies Structural and phase changes in thin films obtained by magnetron sputtering of a target with the composition Ti41Zr38.3Ni20.7 (at.%) were studied under isothermal vacuum annealing in the temperature range from 400 to 800 °C. The boundaries of the thermal stability of the phases have been determined. Coatings consisting of a single icosahedral quasicrystalline phase, as well as films consisting of the 2/1 crystal-approximant phase were obtained. The features of the phase transformation of a quasicrystal into an approximant crystal were investigated, and the activation energy of this transformation was determined at a level of 94 kJ/mol. The dependence of the degree of phase transformation on the temperature and duration of annealing has been established. Досліджено структурно-фазові зміни в тонких плівках, отриманих магнетронним розпиленням мішені складу Ti41Zr38,3Ni20,7 (ат.%), при ізотермічних вакуумних відпалах в інтервалі температур 400…800 °C. Визначено межі термічної стабільності фаз. Отримано однофазні покриття з ікосаедричної квазікристалічної фази, а також з фази кристала-апроксиманта 2/1. Досліджено характер фазового перетворення квазікристала в кристал-апроксимант, і визначена енергія активації цього перетворення на рівні 94 кДж/моль. Встановлено залежність ступеня фазового перетворення від температури і тривалості відпалу. Исследованы структурно-фазовые изменения в тонких плeнках, полученных магнетронным распылением мишени состава Ti41Zr38,3Ni20,7 (ат.%), при изотермических вакуумных отжигах в интервале температур 400…800 °C. Определены границы термической стабильности фаз. Получены однофазные покрытия из икосаэдрической квазикристаллической фазы, а также из фазы кристалла-аппроксиманта 2/1. Исследован характер фазового превращения квазикристалла в кристалл-аппроксимант, и определена энергия активации этого превращения на уровне 94 кДж/моль. Установлена зависимость степени фазового превращения от температуры и продолжительности отжига. 2022 Article Structural-phase transformations in magnetron deposited films of Ti-Zr-Ni systems during annealing in vacuum / S.V. Malykhin, V.V. Kondratenko, I.A. Kopylets, Yu.S. Bogdanov, S.V. Surovitsky, S.S. Borisova, I.G. Shipkova // Problems of Atomic Science and Technology. — 2022. — № 1. — С. 21-25. — Бібліогр.: 17 назв. — англ. 1562-6016 PACS: 52.40.HF DOI: https://doi.org/10.46813/2022-137-021 http://dspace.nbuv.gov.ua/handle/123456789/195827 en Вопросы атомной науки и техники Національний науковий центр «Харківський фізико-технічний інститут» НАН України
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
language English
topic Pure materials and vacuum technologies
Pure materials and vacuum technologies
spellingShingle Pure materials and vacuum technologies
Pure materials and vacuum technologies
Malykhin, S.V.
Kondratenko, V.V.
Kopylets, I.A.
Bogdanov, Yu.S.
Surovitsky, S.V.
Borisova, S.S.
Shipkova, I.G.
Structural-phase transformations in magnetron deposited films of Ti-Zr-Ni systems during annealing in vacuum
Вопросы атомной науки и техники
description Structural and phase changes in thin films obtained by magnetron sputtering of a target with the composition Ti41Zr38.3Ni20.7 (at.%) were studied under isothermal vacuum annealing in the temperature range from 400 to 800 °C. The boundaries of the thermal stability of the phases have been determined. Coatings consisting of a single icosahedral quasicrystalline phase, as well as films consisting of the 2/1 crystal-approximant phase were obtained. The features of the phase transformation of a quasicrystal into an approximant crystal were investigated, and the activation energy of this transformation was determined at a level of 94 kJ/mol. The dependence of the degree of phase transformation on the temperature and duration of annealing has been established.
format Article
author Malykhin, S.V.
Kondratenko, V.V.
Kopylets, I.A.
Bogdanov, Yu.S.
Surovitsky, S.V.
Borisova, S.S.
Shipkova, I.G.
author_facet Malykhin, S.V.
Kondratenko, V.V.
Kopylets, I.A.
Bogdanov, Yu.S.
Surovitsky, S.V.
Borisova, S.S.
Shipkova, I.G.
author_sort Malykhin, S.V.
title Structural-phase transformations in magnetron deposited films of Ti-Zr-Ni systems during annealing in vacuum
title_short Structural-phase transformations in magnetron deposited films of Ti-Zr-Ni systems during annealing in vacuum
title_full Structural-phase transformations in magnetron deposited films of Ti-Zr-Ni systems during annealing in vacuum
title_fullStr Structural-phase transformations in magnetron deposited films of Ti-Zr-Ni systems during annealing in vacuum
title_full_unstemmed Structural-phase transformations in magnetron deposited films of Ti-Zr-Ni systems during annealing in vacuum
title_sort structural-phase transformations in magnetron deposited films of ti-zr-ni systems during annealing in vacuum
publisher Національний науковий центр «Харківський фізико-технічний інститут» НАН України
publishDate 2022
topic_facet Pure materials and vacuum technologies
url http://dspace.nbuv.gov.ua/handle/123456789/195827
citation_txt Structural-phase transformations in magnetron deposited films of Ti-Zr-Ni systems during annealing in vacuum / S.V. Malykhin, V.V. Kondratenko, I.A. Kopylets, Yu.S. Bogdanov, S.V. Surovitsky, S.S. Borisova, I.G. Shipkova // Problems of Atomic Science and Technology. — 2022. — № 1. — С. 21-25. — Бібліогр.: 17 назв. — англ.
series Вопросы атомной науки и техники
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AT kondratenkovv structuralphasetransformationsinmagnetrondepositedfilmsoftizrnisystemsduringannealinginvacuum
AT kopyletsia structuralphasetransformationsinmagnetrondepositedfilmsoftizrnisystemsduringannealinginvacuum
AT bogdanovyus structuralphasetransformationsinmagnetrondepositedfilmsoftizrnisystemsduringannealinginvacuum
AT surovitskysv structuralphasetransformationsinmagnetrondepositedfilmsoftizrnisystemsduringannealinginvacuum
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first_indexed 2024-03-31T09:17:25Z
last_indexed 2024-03-31T09:17:25Z
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