TiN coating etching from a surface of the instrument in beam-plasma system

TiN coating etching from a surface of the instrument in beam-plasma system

The results of reactive ion-plasma etching of TiN coatings from a surface of the tool in a beam-plasma system are submitted. The researches were made on the industrial set-up of a type «the Plasma boiler» with a magnetic field of the plug configuration. The electron guns on the basis of magnetron di...

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Збережено в:
Бібліографічні деталі
Дата:2000
Автори: Bizyukov, A.A., Kashaba, A.Y., Sereda, K.N., Sleptsov, V.V., Danziger, М., Phiodorov, S.
Формат: Стаття
Мова:English
Опубліковано: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2000
Назва видання:Вопросы атомной науки и техники
Теми:
Low temperature plasma and plasma technologies
Онлайн доступ:http://dspace.nbuv.gov.ua/handle/123456789/78562
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Цитувати:TiN coating etching from a surface of the instrument in beam-plasma system / A.A. Bizyukov, A.Y. Kashaba, K.N. Sereda, V.V. Sleptsov, М. Danziger, S. Phiodorov // Вопросы атомной науки и техники. — 2000. — № 6. — С. 163-165. — Бібліогр.: 7 назв. — англ.

Репозитарії

Digital Library of Periodicals of National Academy of Sciences of Ukraine
id irk-123456789-78562
record_format dspace
spelling irk-123456789-785622015-03-19T03:02:32Z TiN coating etching from a surface of the instrument in beam-plasma system Bizyukov, A.A. Kashaba, A.Y. Sereda, K.N. Sleptsov, V.V. Danziger, М. Phiodorov, S. Low temperature plasma and plasma technologies The results of reactive ion-plasma etching of TiN coatings from a surface of the tool in a beam-plasma system are submitted. The researches were made on the industrial set-up of a type «the Plasma boiler» with a magnetic field of the plug configuration. The electron guns on the basis of magnetron discharge injected from magnetic plug in a magnetic trap volume oncoming electron beams with a current density up to 2 A/cm², energy 350÷550eV. At pressure 1.10⁻³ ÷ 5.10⁻³ Torr in a magnetic trap the beam-plasma discharge was fired from which one crosswise magnetic fields an ion flow on items was extracted. As working gases the mixture Ar and CF₄ were used. The given beam-plasma system allowed selectively to remove from a surface of the tools TiN coating at speed of etching 1÷2 µm/h on the area of 12000cm². 2000 Article TiN coating etching from a surface of the instrument in beam-plasma system / A.A. Bizyukov, A.Y. Kashaba, K.N. Sereda, V.V. Sleptsov, М. Danziger, S. Phiodorov // Вопросы атомной науки и техники. — 2000. — № 6. — С. 163-165. — Бібліогр.: 7 назв. — англ. 1562-6016 http://dspace.nbuv.gov.ua/handle/123456789/78562 533.9 en Вопросы атомной науки и техники Національний науковий центр «Харківський фізико-технічний інститут» НАН України
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
language English
topic Low temperature plasma and plasma technologies
Low temperature plasma and plasma technologies
spellingShingle Low temperature plasma and plasma technologies
Low temperature plasma and plasma technologies
Bizyukov, A.A.
Kashaba, A.Y.
Sereda, K.N.
Sleptsov, V.V.
Danziger, М.
Phiodorov, S.
TiN coating etching from a surface of the instrument in beam-plasma system
Вопросы атомной науки и техники
description The results of reactive ion-plasma etching of TiN coatings from a surface of the tool in a beam-plasma system are submitted. The researches were made on the industrial set-up of a type «the Plasma boiler» with a magnetic field of the plug configuration. The electron guns on the basis of magnetron discharge injected from magnetic plug in a magnetic trap volume oncoming electron beams with a current density up to 2 A/cm², energy 350÷550eV. At pressure 1.10⁻³ ÷ 5.10⁻³ Torr in a magnetic trap the beam-plasma discharge was fired from which one crosswise magnetic fields an ion flow on items was extracted. As working gases the mixture Ar and CF₄ were used. The given beam-plasma system allowed selectively to remove from a surface of the tools TiN coating at speed of etching 1÷2 µm/h on the area of 12000cm².
format Article
author Bizyukov, A.A.
Kashaba, A.Y.
Sereda, K.N.
Sleptsov, V.V.
Danziger, М.
Phiodorov, S.
author_facet Bizyukov, A.A.
Kashaba, A.Y.
Sereda, K.N.
Sleptsov, V.V.
Danziger, М.
Phiodorov, S.
author_sort Bizyukov, A.A.
title TiN coating etching from a surface of the instrument in beam-plasma system
title_short TiN coating etching from a surface of the instrument in beam-plasma system
title_full TiN coating etching from a surface of the instrument in beam-plasma system
title_fullStr TiN coating etching from a surface of the instrument in beam-plasma system
title_full_unstemmed TiN coating etching from a surface of the instrument in beam-plasma system
title_sort tin coating etching from a surface of the instrument in beam-plasma system
publisher Національний науковий центр «Харківський фізико-технічний інститут» НАН України
publishDate 2000
topic_facet Low temperature plasma and plasma technologies
url http://dspace.nbuv.gov.ua/handle/123456789/78562
citation_txt TiN coating etching from a surface of the instrument in beam-plasma system / A.A. Bizyukov, A.Y. Kashaba, K.N. Sereda, V.V. Sleptsov, М. Danziger, S. Phiodorov // Вопросы атомной науки и техники. — 2000. — № 6. — С. 163-165. — Бібліогр.: 7 назв. — англ.
series Вопросы атомной науки и техники
work_keys_str_mv AT bizyukovaa tincoatingetchingfromasurfaceoftheinstrumentinbeamplasmasystem
AT kashabaay tincoatingetchingfromasurfaceoftheinstrumentinbeamplasmasystem
AT seredakn tincoatingetchingfromasurfaceoftheinstrumentinbeamplasmasystem
AT sleptsovvv tincoatingetchingfromasurfaceoftheinstrumentinbeamplasmasystem
AT danzigerm tincoatingetchingfromasurfaceoftheinstrumentinbeamplasmasystem
AT phiodorovs tincoatingetchingfromasurfaceoftheinstrumentinbeamplasmasystem
first_indexed 2023-10-18T19:16:44Z
last_indexed 2023-10-18T19:16:44Z
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