2025-02-22T21:32:44-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: Query fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-79286%22&qt=morelikethis&rows=5
2025-02-22T21:32:44-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: => GET http://localhost:8983/solr/biblio/select?fl=%2A&wt=json&json.nl=arrarr&q=id%3A%22irk-123456789-79286%22&qt=morelikethis&rows=5
2025-02-22T21:32:44-05:00 DEBUG: VuFindSearch\Backend\Solr\Connector: <= 200 OK
2025-02-22T21:32:44-05:00 DEBUG: Deserialized SOLR response
Large-area surface wave plasma source

Large-area surface wave plasma source

A surface wave plasma source for the production of a large-diameter, high electron density and low electron temperature plasma at low pressure without using a magnetic field for plasma processing and thin film preparation are. The DC or RF voltage with the frequency of 13.56 MHz can supply the sourc...

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Bibliographic Details
Main Authors: Azarenkov, N.A., Bizyukov, A.A., Sereda, K.N., Tseluyko, A.Ph., Yunakov, N.N., Gapon, A.V., Kashaba, A.Y.
Format: Article
Language:English
Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2002
Series:Вопросы атомной науки и техники
Subjects:
Low temperature plasma and plasma technologies
Online Access:http://dspace.nbuv.gov.ua/handle/123456789/79286
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http://dspace.nbuv.gov.ua/handle/123456789/79286

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