Vacuum-arc equipment for ion-plasma deposition of coatings
A brief overview of NSC KIPT developments intended for creating the process equipment for vacuum-arc deposition of coatings is presented. The equipment devised is to be adapted to large-scale manufacture conditions and to be most suitable for commercial production. Consideration is given to the deve...
Збережено в:
| Дата: | 2000 |
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| Автори: | , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2000
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| Назва видання: | Вопросы атомной науки и техники |
| Теми: | |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/82381 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Vacuum-arc equipment for ion-plasma deposition of coatings / I.I. Aksenov, V.A. Belous // Вопросы атомной науки и техники. — 2000. — № 3. — С. 156-158. — Бібліогр.: 9 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
irk-123456789-82381 |
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dspace |
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irk-123456789-823812015-05-30T03:02:07Z Vacuum-arc equipment for ion-plasma deposition of coatings Aksenov, I.I. Belous, V.A. Low Temperature Plasma and Plasma Technologies A brief overview of NSC KIPT developments intended for creating the process equipment for vacuum-arc deposition of coatings is presented. The equipment devised is to be adapted to large-scale manufacture conditions and to be most suitable for commercial production. Consideration is given to the developments of high-efficiency butt-end plasma sources, vacuum-arc evaporators with extended (cylindrical and planar) cathodes, magnetic filters for removal of macroparticles from plasma, and also a number of devices to form various-purpose coatings. 2000 Article Vacuum-arc equipment for ion-plasma deposition of coatings / I.I. Aksenov, V.A. Belous // Вопросы атомной науки и техники. — 2000. — № 3. — С. 156-158. — Бібліогр.: 9 назв. — англ. 1562-6016 http://dspace.nbuv.gov.ua/handle/123456789/82381 533.9 en Вопросы атомной науки и техники Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| topic |
Low Temperature Plasma and Plasma Technologies Low Temperature Plasma and Plasma Technologies |
| spellingShingle |
Low Temperature Plasma and Plasma Technologies Low Temperature Plasma and Plasma Technologies Aksenov, I.I. Belous, V.A. Vacuum-arc equipment for ion-plasma deposition of coatings Вопросы атомной науки и техники |
| description |
A brief overview of NSC KIPT developments intended for creating the process equipment for vacuum-arc deposition of coatings is presented. The equipment devised is to be adapted to large-scale manufacture conditions and to be most suitable for commercial production. Consideration is given to the developments of high-efficiency butt-end plasma sources, vacuum-arc evaporators with extended (cylindrical and planar) cathodes, magnetic filters for removal of macroparticles from plasma, and also a number of devices to form various-purpose coatings. |
| format |
Article |
| author |
Aksenov, I.I. Belous, V.A. |
| author_facet |
Aksenov, I.I. Belous, V.A. |
| author_sort |
Aksenov, I.I. |
| title |
Vacuum-arc equipment for ion-plasma deposition of coatings |
| title_short |
Vacuum-arc equipment for ion-plasma deposition of coatings |
| title_full |
Vacuum-arc equipment for ion-plasma deposition of coatings |
| title_fullStr |
Vacuum-arc equipment for ion-plasma deposition of coatings |
| title_full_unstemmed |
Vacuum-arc equipment for ion-plasma deposition of coatings |
| title_sort |
vacuum-arc equipment for ion-plasma deposition of coatings |
| publisher |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України |
| publishDate |
2000 |
| topic_facet |
Low Temperature Plasma and Plasma Technologies |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/82381 |
| citation_txt |
Vacuum-arc equipment for ion-plasma deposition of coatings / I.I. Aksenov, V.A. Belous // Вопросы атомной науки и техники. — 2000. — № 3. — С. 156-158. — Бібліогр.: 9 назв. — англ. |
| series |
Вопросы атомной науки и техники |
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