Formation stages of pulsed discharge in oxygen and carbon tetrafluoride

• Datum: 2016
• Hauptverfasser: Lisovskiy, V.A., Ogloblina, P.A., Dudin, S.V., Yegorenkov, V.D., Dakhov, A.N., Farenik, V.I.
• Format: Artikel
• Sprache: English
• Veröffentlicht: Науковий фізико-технологічний центр МОН та НАН України 2016
• Schriftenreihe: Журнал физики и инженерии поверхности
• Online Zugang: https://nasplib.isofts.kiev.ua/handle/123456789/117057
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Zitieren: Formation stages of pulsed discharge in oxygen and carbon tetrafluoride / V.A. Lisovskiy, P.A. Ogloblina, S.V. Dudin, V.D. Yegorenkov, A.N. Dakhov, V.I. Farenik // Журнал физики и инженерии поверхности. — 2016. — Т. 1, № 4. — С. 351-360. — Бібліогр.: 26 назв. — англ.

This paper reports the current and voltage oscilloscope waveforms of a pulsed discharge measured in a broad range of frequencies (from 20 to 300 kHz) and duty cycle from 0.15 to 0.85 for two values of oxygen and carbon tetrafluoride pressure values of 0.1 and 1 Torr. Current oscilloscope waveforms of the glow pulsed discharge have been found to possess a plasma phase and an afterglow phase. The following stages of the plasma phase have been observed: 1. The capacitive current pulse of about 0.5–1 μs in duration; 2. The current growth stage the duration of which depends on the gas species, the plasma phase duration and the pressure; 3. The plateau (remarkably pronounced only for carbon tetrafluoride and absent for other gases); 4. The current decrease of tens microseconds in duration down to the level corresponding to that of the direct voltage discharge.