Peculiarities of thermoannealing in n-Si and n-Ge crystals with oxygen impurity

. Investigated in this work were changes in the concentration of charge carriers
 ne and their mobilities u, which occur under the influence of thermoannealing of n - Si
 and n - Ge crystals grown by the Czochralski method. Thermoannealing of n - Si
 samples was carried out b...

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Veröffentlicht in:Semiconductor Physics Quantum Electronics & Optoelectronics
Datum:2012
Hauptverfasser: Baranskii, P.I., Gaidar, G.P.
Format: Artikel
Sprache:Englisch
Veröffentlicht: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2012
Online Zugang:https://nasplib.isofts.kiev.ua/handle/123456789/118307
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Zitieren:Peculiarities of thermoannealing in n-Si and n-Ge crystals
 with oxygen impurity / P.I. Baranskii, G.P. Gaidar // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2012. — Т. 15, № 3. — С. 218-222. — Бібліогр.: 24 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
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author Baranskii, P.I.
Gaidar, G.P.
author_facet Baranskii, P.I.
Gaidar, G.P.
citation_txt Peculiarities of thermoannealing in n-Si and n-Ge crystals
 with oxygen impurity / P.I. Baranskii, G.P. Gaidar // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2012. — Т. 15, № 3. — С. 218-222. — Бібліогр.: 24 назв. — англ.
collection DSpace DC
container_title Semiconductor Physics Quantum Electronics & Optoelectronics
description . Investigated in this work were changes in the concentration of charge carriers
 ne and their mobilities u, which occur under the influence of thermoannealing of n - Si
 and n - Ge crystals grown by the Czochralski method. Thermoannealing of n - Si
 samples was carried out both at 450 °C and 650 °C. The results of the influence of twostage
 (combined) thermoannealing have been presented. In the first series of
 experiments, the annealing was performed at 450 °C with varied duration (from 5 to
 45 h) at the beginning, and then it was carried out for 40 hours at 650 °C. The second
 series of experiments was as follows: the annealing at 450 °C for 45-hour duration, then
 the annealing at 650 °C, which was carried out for various periods of time
 (5, 10, 20, 45, 66 hours). The observations for changes of ne and u were carried out both
 at the temperature 300 and 77 K. It is ascertained that changing the main parameters (ne
 and u) in n  Ge As heavily doped single crystals, as a result of the series of
 thermoannealings (duration 30 min in each case) within the temperature range from 540
 to 900 °C, is non-monotonous due to transformation of the thermodonors TD - I into
 TD-II .
first_indexed 2025-11-26T22:50:15Z
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language English
last_indexed 2025-11-26T22:50:15Z
publishDate 2012
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
record_format dspace
spelling Baranskii, P.I.
Gaidar, G.P.
2017-05-29T16:43:47Z
2017-05-29T16:43:47Z
2012
Peculiarities of thermoannealing in n-Si and n-Ge crystals
 with oxygen impurity / P.I. Baranskii, G.P. Gaidar // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2012. — Т. 15, № 3. — С. 218-222. — Бібліогр.: 24 назв. — англ.
1560-8034
PACS 61.82.Fk
https://nasplib.isofts.kiev.ua/handle/123456789/118307
. Investigated in this work were changes in the concentration of charge carriers
 ne and their mobilities u, which occur under the influence of thermoannealing of n - Si
 and n - Ge crystals grown by the Czochralski method. Thermoannealing of n - Si
 samples was carried out both at 450 °C and 650 °C. The results of the influence of twostage
 (combined) thermoannealing have been presented. In the first series of
 experiments, the annealing was performed at 450 °C with varied duration (from 5 to
 45 h) at the beginning, and then it was carried out for 40 hours at 650 °C. The second
 series of experiments was as follows: the annealing at 450 °C for 45-hour duration, then
 the annealing at 650 °C, which was carried out for various periods of time
 (5, 10, 20, 45, 66 hours). The observations for changes of ne and u were carried out both
 at the temperature 300 and 77 K. It is ascertained that changing the main parameters (ne
 and u) in n  Ge As heavily doped single crystals, as a result of the series of
 thermoannealings (duration 30 min in each case) within the temperature range from 540
 to 900 °C, is non-monotonous due to transformation of the thermodonors TD - I into
 TD-II .
en
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
Semiconductor Physics Quantum Electronics & Optoelectronics
Peculiarities of thermoannealing in n-Si and n-Ge crystals with oxygen impurity
Article
published earlier
spellingShingle Peculiarities of thermoannealing in n-Si and n-Ge crystals with oxygen impurity
Baranskii, P.I.
Gaidar, G.P.
title Peculiarities of thermoannealing in n-Si and n-Ge crystals with oxygen impurity
title_full Peculiarities of thermoannealing in n-Si and n-Ge crystals with oxygen impurity
title_fullStr Peculiarities of thermoannealing in n-Si and n-Ge crystals with oxygen impurity
title_full_unstemmed Peculiarities of thermoannealing in n-Si and n-Ge crystals with oxygen impurity
title_short Peculiarities of thermoannealing in n-Si and n-Ge crystals with oxygen impurity
title_sort peculiarities of thermoannealing in n-si and n-ge crystals with oxygen impurity
url https://nasplib.isofts.kiev.ua/handle/123456789/118307
work_keys_str_mv AT baranskiipi peculiaritiesofthermoannealinginnsiandngecrystalswithoxygenimpurity
AT gaidargp peculiaritiesofthermoannealinginnsiandngecrystalswithoxygenimpurity