Electrical and light-emitting properties of silicon dioxide co-implanted by carbon and silicon ions

In this paper we explore the electrophysical and electroluminescence (EL)
 properties of thermally grown 350 nm thick SiO₂ layers co-implanted with Si⁺
 and C⁺
 ions. The implanting fluencies were chosen in such a way that the peak concentration of
 excess Si and...

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Veröffentlicht in:Semiconductor Physics Quantum Electronics & Optoelectronics
Datum:2008
Hauptverfasser: Nazarov, A.N., Osiyuk, I.N., Tiagulskyi, S.I., Lysenko, V.S., Tyagulskyy, I.P., Torbin, V.N., Omelchuk, V.V., Nazarova, T.N., Rebohle, L., Skorupa, W.
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Sprache:Englisch
Veröffentlicht: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2008
Online Zugang:https://nasplib.isofts.kiev.ua/handle/123456789/119072
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Zitieren:Electrical and light-emitting properties of silicon dioxide co-implanted by carbon and silicon ions / A.N. Nazarov, I.N. Osiyuk , S.I. Tiagulskyi, V.S. Lysenko, I.P. Tyagulskyy , V.N. Torbin, V.V. Omelchuk, T.M. Nazarova, L.Rebohle, W.Skorupa // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2008. — Т. 11, № 4. — С. 319-323. — Бібліогр.: 27 назв. — англ.

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author Nazarov, A.N.
Osiyuk, I.N.
Tiagulskyi, S.I.
Lysenko, V.S.
Tyagulskyy, I.P.
Torbin, V.N.
Omelchuk, V.V.
Nazarova, T.N.
Rebohle, L.
Skorupa, W.
author_facet Nazarov, A.N.
Osiyuk, I.N.
Tiagulskyi, S.I.
Lysenko, V.S.
Tyagulskyy, I.P.
Torbin, V.N.
Omelchuk, V.V.
Nazarova, T.N.
Rebohle, L.
Skorupa, W.
citation_txt Electrical and light-emitting properties of silicon dioxide co-implanted by carbon and silicon ions / A.N. Nazarov, I.N. Osiyuk , S.I. Tiagulskyi, V.S. Lysenko, I.P. Tyagulskyy , V.N. Torbin, V.V. Omelchuk, T.M. Nazarova, L.Rebohle, W.Skorupa // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2008. — Т. 11, № 4. — С. 319-323. — Бібліогр.: 27 назв. — англ.
collection DSpace DC
container_title Semiconductor Physics Quantum Electronics & Optoelectronics
description In this paper we explore the electrophysical and electroluminescence (EL)
 properties of thermally grown 350 nm thick SiO₂ layers co-implanted with Si⁺
 and C⁺
 ions. The implanting fluencies were chosen in such a way that the peak concentration of
 excess Si and C of 5-10 at.% were achieved. Effect of hydrogen plasma treatment on
 electroluminescent and durability of SiO₂ (Si,C) - Si-system is studied. Combined
 measurements of charge trapping and EL intensity as a function of the injected charge
 and current have been carried out with the aim of clarifying the mechanisms of
 electroluminescence. EL was demonstrated to have defect-related nature. Cross sections
 of both electron traps and hole traps were determined. EL quenching at a great levels of
 injected charge is associated with strong negative charge capture, following capture of
 positive charge leading to electrical breakdown of SiO₂ structures.
first_indexed 2025-11-26T06:24:07Z
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institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
issn 1560-8034
language English
last_indexed 2025-11-26T06:24:07Z
publishDate 2008
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
record_format dspace
spelling Nazarov, A.N.
Osiyuk, I.N.
Tiagulskyi, S.I.
Lysenko, V.S.
Tyagulskyy, I.P.
Torbin, V.N.
Omelchuk, V.V.
Nazarova, T.N.
Rebohle, L.
Skorupa, W.
2017-06-03T05:04:44Z
2017-06-03T05:04:44Z
2008
Electrical and light-emitting properties of silicon dioxide co-implanted by carbon and silicon ions / A.N. Nazarov, I.N. Osiyuk , S.I. Tiagulskyi, V.S. Lysenko, I.P. Tyagulskyy , V.N. Torbin, V.V. Omelchuk, T.M. Nazarova, L.Rebohle, W.Skorupa // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2008. — Т. 11, № 4. — С. 319-323. — Бібліогр.: 27 назв. — англ.
1560-8034
PACS 68.35,78.55
https://nasplib.isofts.kiev.ua/handle/123456789/119072
In this paper we explore the electrophysical and electroluminescence (EL)
 properties of thermally grown 350 nm thick SiO₂ layers co-implanted with Si⁺
 and C⁺
 ions. The implanting fluencies were chosen in such a way that the peak concentration of
 excess Si and C of 5-10 at.% were achieved. Effect of hydrogen plasma treatment on
 electroluminescent and durability of SiO₂ (Si,C) - Si-system is studied. Combined
 measurements of charge trapping and EL intensity as a function of the injected charge
 and current have been carried out with the aim of clarifying the mechanisms of
 electroluminescence. EL was demonstrated to have defect-related nature. Cross sections
 of both electron traps and hole traps were determined. EL quenching at a great levels of
 injected charge is associated with strong negative charge capture, following capture of
 positive charge leading to electrical breakdown of SiO₂ structures.
en
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
Semiconductor Physics Quantum Electronics & Optoelectronics
Electrical and light-emitting properties of silicon dioxide co-implanted by carbon and silicon ions
Article
published earlier
spellingShingle Electrical and light-emitting properties of silicon dioxide co-implanted by carbon and silicon ions
Nazarov, A.N.
Osiyuk, I.N.
Tiagulskyi, S.I.
Lysenko, V.S.
Tyagulskyy, I.P.
Torbin, V.N.
Omelchuk, V.V.
Nazarova, T.N.
Rebohle, L.
Skorupa, W.
title Electrical and light-emitting properties of silicon dioxide co-implanted by carbon and silicon ions
title_full Electrical and light-emitting properties of silicon dioxide co-implanted by carbon and silicon ions
title_fullStr Electrical and light-emitting properties of silicon dioxide co-implanted by carbon and silicon ions
title_full_unstemmed Electrical and light-emitting properties of silicon dioxide co-implanted by carbon and silicon ions
title_short Electrical and light-emitting properties of silicon dioxide co-implanted by carbon and silicon ions
title_sort electrical and light-emitting properties of silicon dioxide co-implanted by carbon and silicon ions
url https://nasplib.isofts.kiev.ua/handle/123456789/119072
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