Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering

• Date: 2010
• Main Authors: Zayats, M.S., Boiko, V.G., Gentsar, P.O., Vuichyk, M.V., Lytvyn, O.S., Stronski, A.V.
• Format: Article
• Language: English
• Published: НТК «Інститут монокристалів» НАН України 2010
• Series: Functional Materials
• Subjects: Characterization and properties
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/135183
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering / M.S. Zayats, V.G. Boiko, P.O. Gentsar, M.V. Vuichyk, O.S. Lytvyn, A.V. Stronski // Functional Materials. — 2010. — Т. 17, № 2. — С. 209-212. — Бібліогр.: 11 назв. — англ.