Температурний та лазерний відпал нестехіометричних плівок SiOx
The last achievements in the field of creation of technologies of receiving silicon nanocrystals and the nanocomposite films containing nanocrystals of silicon in a dielectric matrix are described. The special attention is paid to two methods - temperature and laser annealing of  nonsto...
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| Date: | 2013 |
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| Main Authors: | , |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
Chuiko Institute of Surface Chemistry National Academy of Sciences of Ukraine
2013
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| Online Access: | https://surfacezbir.com.ua/index.php/surface/article/view/506 |
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| Journal Title: | Surface |
| Download file: |  |
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