Влияние облучения быстрыми нейтронами на эпитаксиальный арсенид галлия
The paper demonstrates the possibility of controlling the parameters of gallium arsenide epitaxial layers using radiation treatment with fast neutrons. From a technological perspective, neutron irradiation is proposed to be divided into two types depending on the radiation dose. The first one (radia...
Saved in:
| Published in: | Технологія та конструювання в електронній апаратурі |
|---|---|
| Date: | 2002 |
| Issue: | 6 |
| Pages: | 7-9 |
| ISSN: | 3083-6549 |
| Author Affiliations: |
|
| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2002
|
| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2002.6.07 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Technology and design in electronic equipment |
| Download file: |
|
Institution
Technology and design in electronic equipment| Summary: | The paper demonstrates the possibility of controlling the parameters of gallium arsenide epitaxial layers using radiation treatment with fast neutrons. From a technological perspective, neutron irradiation is proposed to be divided into two types depending on the radiation dose. The first one (radiation doses up to 1·1015 cm–2) can serve as a means of improving the properties of the layers by increasing carrier mobility and operation speed. The second one (radiation doses exceeding 5·1015 cm–2) reduces the concentration and mobility of charge carriers. |
|---|---|
| ISSN: | 3083-6549 |