Влияние облучения быстрыми нейтронами на эпитаксиальный арсенид галлия

The paper demonstrates the possibility of controlling the parameters of gallium arsenide epitaxial layers using radiation treatment with fast neutrons. From a technological perspective, neutron irradiation is proposed to be divided into two types depending on the radiation dose. The first one (radia...

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Bibliographic Details
Published in:Технологія та конструювання в електронній апаратурі
Date:2002
Issue:6
Pages:7-9
ISSN:3083-6549
Author Affiliations:
  • V. A. Zavadsky — Odessa National Maritime Academy, Odesа, Ukraine
  • S. V. Lenkov — National Aviation University, Kyiv, Ukraine
  • D. V. Lukomsky — National Aviation University, Kyiv, Ukraine
  • V. A. Mokritsky — Odessa National Maritime Academy, Odesа, Ukraine
Main Authors: Zavadsky, V. A., Lenkov, S. V., Lukomsky, D. V., Mokritsky, V. A.
Format: Article
Language:English
Published: PE "Politekhperiodika", Book and Journal Publishers 2002
Subjects:
Online Access:https://www.tkea.com.ua/index.php/journal/article/view/TKEA2002.6.07
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Journal Title:Technology and design in electronic equipment
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Technology and design in electronic equipment
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Summary:The paper demonstrates the possibility of controlling the parameters of gallium arsenide epitaxial layers using radiation treatment with fast neutrons. From a technological perspective, neutron irradiation is proposed to be divided into two types depending on the radiation dose. The first one (radiation doses up to 1·1015 cm–2) can serve as a means of improving the properties of the layers by increasing carrier mobility and operation speed. The second one (radiation doses exceeding 5·1015 cm–2) reduces the concentration and mobility of charge carriers.
ISSN:3083-6549