Наноструктурированные антидиффузионные слои в контактах к широкозонным полупроводникам

• Date: 2013
• Main Author: Kudryk, Ya. Ya.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2013
• Subjects: антидиффузионный слой; нанокристаллическая пленка; термическая стабильность; широкозонный полупроводник; контакт
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2013.6.03
• Journal Title: Technology and design in electronic equipment

The interrelation between the antidiffusion properties of titanium diboride films and their nanocrystalline structure is investigated. We made a valid assumption that the main reason for degradation of contacts with TiB2-based diffusion layers is diffusion through the TiB2 film through dislocations...