Физико-технологические аспекты создания низковольтных ограничителей напряжения на основе кремния

• Date: 2010
• Main Authors: Rakhmatov, A. Z., Skorniakov, S. L., Karimov, A. V., Yodgorova, D. M., Abdulkhayev, O. A., Buzrukov, U. M.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2010
• Subjects: диффузия; мышьяк; ампула; ограничитель напряжения; твердая фаза
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2010.5-6.30
• Journal Title: Technology and design in electronic equipment

It is shown that by arsenic diffusion alloying of silicon plates in conditions of deaerated quartz ampoule the most effective is the use of a compound source in the form of crystal arsenic and silicon powder of boron-implanted silicon grade with base impurity (boron) concentration not less than the...