Исследование влияния электронного облучения на кремниевые тензорезисторы
The characteristics of semiconductor strain gauges based on boron doped р-type silicon whiskers under high energy electron irradiation were studied. Strain gauges were irradiated at room temperature by electrons with energies 4,2–14 MeV and different doses 5·1016–1·1018 el/cm2. The...
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| Datum: | 2010 |
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| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | Ukrainian |
| Veröffentlicht: |
PE "Politekhperiodika", Book and Journal Publishers
2010
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| Schlagworte: | |
| Online Zugang: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2010.1.26 |
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| Назва журналу: | Technology and design in electronic equipment |
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Technology and design in electronic equipment| Zusammenfassung: | The characteristics of semiconductor strain gauges based on boron doped р-type silicon whiskers under high energy electron irradiation were studied. Strain gauges were irradiated at room temperature by electrons with energies 4,2–14 MeV and different doses 5·1016–1·1018 el/cm2. The main parameters of irradiated strain gauges: resistance, its temperature dependence and resistance change vs strain at –196…+100°C and –269…+20°C temperature ranges were measured. There are determined the values of electron irradiation energy and dose at which the radiation stability of strain gauges could be ensured. |
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