Технология изготовления автоэмиссионных кремниевых катодов субмикронных размеров

• Date: 2007
• Main Authors: Druzhynin, A. A., Holota, V. I., Kogut, I. T.
• Format: Article
• Language: Ukrainian
• Published: PE "Politekhperiodika", Book and Journal Publishers 2007
• Subjects: технология изготовления; субмикронный размер; автоэмиссионный катод; апертура электрода; электрическое поле
• Online Access: https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.5.50
• Journal Title: Technology and design in electronic equipment

Modern fabrication technologies of field emission cathodes are analyzed. A practical method for forming topological elements of submicron dimensions is proposed. A CMOS-based technology using micron-scale photomasks has been developed and modeled for the fabrication of single-tip, multi-tip, and bl...