Трехкоординатный пьезокерамический сканер на биморфных пьезоэлементах для зондового наномикроскопа
A design of a piezoceramic scanner for nanomicroscopes based on bimorph piezoelements is proposed and investigated. A model of the scanner was constructed and analyzed using the MicroCap 7.0 software. It was established that the coupling level between the bimorph piezoelements generating oscillation...
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| Date: | 2007 |
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| Main Authors: | , , |
| Format: | Article |
| Language: | Ukrainian |
| Published: |
PE "Politekhperiodika", Book and Journal Publishers
2007
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| Subjects: | |
| Online Access: | https://www.tkea.com.ua/index.php/journal/article/view/TKEA2007.4.13 |
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| Journal Title: | Technology and design in electronic equipment |
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Technology and design in electronic equipment| Summary: | A design of a piezoceramic scanner for nanomicroscopes based on bimorph piezoelements is proposed and investigated. A model of the scanner was constructed and analyzed using the MicroCap 7.0 software. It was established that the coupling level between the bimorph piezoelements generating oscillations along the X, Y, and Z coordinates does not exceed –20 dB. |
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