Electrical properties of semiconductor structures with Si nanoclusters in SiO2 grown by high temperature annealing technology of SiOX layer, X<2

Electrical properties of semiconductor structures with Si nanoclusters in SiO2 grown by high temperature annealing technology of SiOX layer, X<2

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Bibliographic Details
Date:2010
Main Authors: S. V. Bunak, A. A. Buyanin, V. V. Ilchenko, V. V. Marin, V. P. Melnik, I. M. Khacevich, O. V. Tretyak, A. G. Shkavro
Format: Article
Language:English
Published: 2010
Series:Semiconductor Physics, Quantum Electronics and Optoelectronics
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000349118
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-100040
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spelling open-sciencenbuvgovua-1000402024-04-17T17:54:38Z Electrical properties of semiconductor structures with Si nanoclusters in SiO2 grown by high temperature annealing technology of SiOX layer, X<2 S. V. Bunak A. A. Buyanin V. V. Ilchenko V. V. Marin V. P. Melnik I. M. Khacevich O. V. Tretyak A. G. Shkavro 1560-8034 2010 en Semiconductor Physics, Quantum Electronics and Optoelectronics http://jnas.nbuv.gov.ua/article/UJRN-0000349118 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Semiconductor Physics, Quantum Electronics and Optoelectronics
spellingShingle Semiconductor Physics, Quantum Electronics and Optoelectronics
S. V. Bunak
A. A. Buyanin
V. V. Ilchenko
V. V. Marin
V. P. Melnik
I. M. Khacevich
O. V. Tretyak
A. G. Shkavro
Electrical properties of semiconductor structures with Si nanoclusters in SiO2 grown by high temperature annealing technology of SiOX layer, X<2
format Article
author S. V. Bunak
A. A. Buyanin
V. V. Ilchenko
V. V. Marin
V. P. Melnik
I. M. Khacevich
O. V. Tretyak
A. G. Shkavro
author_facet S. V. Bunak
A. A. Buyanin
V. V. Ilchenko
V. V. Marin
V. P. Melnik
I. M. Khacevich
O. V. Tretyak
A. G. Shkavro
author_sort S. V. Bunak
title Electrical properties of semiconductor structures with Si nanoclusters in SiO2 grown by high temperature annealing technology of SiOX layer, X<2
title_short Electrical properties of semiconductor structures with Si nanoclusters in SiO2 grown by high temperature annealing technology of SiOX layer, X<2
title_full Electrical properties of semiconductor structures with Si nanoclusters in SiO2 grown by high temperature annealing technology of SiOX layer, X<2
title_fullStr Electrical properties of semiconductor structures with Si nanoclusters in SiO2 grown by high temperature annealing technology of SiOX layer, X<2
title_full_unstemmed Electrical properties of semiconductor structures with Si nanoclusters in SiO2 grown by high temperature annealing technology of SiOX layer, X<2
title_sort electrical properties of semiconductor structures with si nanoclusters in sio2 grown by high temperature annealing technology of siox layer, x<2
publishDate 2010
url http://jnas.nbuv.gov.ua/article/UJRN-0000349118
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AT aabuyanin electricalpropertiesofsemiconductorstructureswithsinanoclustersinsio2grownbyhightemperatureannealingtechnologyofsioxlayerxlt2
AT vvilchenko electricalpropertiesofsemiconductorstructureswithsinanoclustersinsio2grownbyhightemperatureannealingtechnologyofsioxlayerxlt2
AT vvmarin electricalpropertiesofsemiconductorstructureswithsinanoclustersinsio2grownbyhightemperatureannealingtechnologyofsioxlayerxlt2
AT vpmelnik electricalpropertiesofsemiconductorstructureswithsinanoclustersinsio2grownbyhightemperatureannealingtechnologyofsioxlayerxlt2
AT imkhacevich electricalpropertiesofsemiconductorstructureswithsinanoclustersinsio2grownbyhightemperatureannealingtechnologyofsioxlayerxlt2
AT ovtretyak electricalpropertiesofsemiconductorstructureswithsinanoclustersinsio2grownbyhightemperatureannealingtechnologyofsioxlayerxlt2
AT agshkavro electricalpropertiesofsemiconductorstructureswithsinanoclustersinsio2grownbyhightemperatureannealingtechnologyofsioxlayerxlt2
first_indexed 2025-07-22T15:14:48Z
last_indexed 2025-07-22T15:14:48Z
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