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Interaction of chalcogenide As4Se96 films with electron beam when used as electronic resists

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Bibliographic Details
Date:	2020
Main Authors:	B. V. Bilanych, O. Shylenko, V. M. Latyshev, A. Feher, V. S. Bilanych, V. M. Rizak, V. Komanicky
Format:	Article
Language:	English
Published:	2020
Series:	Ukrainian Journal of Physics
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0001127980
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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