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In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing

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Bibliographic Details
Date:	2017
Main Authors:	Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. Filatov, G. Montej
Format:	Article
Language:	English
Published:	2017
Series:	Superhard Materials
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000850183
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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