Buchumschlag

In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing

Gespeichert in:

Bibliographische Detailangaben
Datum:	2017
Hauptverfasser:	Ju. D. Filatov, V. I. Sidorko, S. V. Kovalev, Ju. Filatov, G. Montej
Format:	Artikel
Sprache:	Englisch
Veröffentlicht:	2017
Schriftenreihe:	Superhard Materials
Online Zugang:	http://jnas.nbuv.gov.ua/article/UJRN-0000850183
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

Institution

Library portal of National Academy of Sciences of Ukraine | LibNAS

Ähnliche Einträge

Precision shaping flat surfaces details of optics and microelectronics when polishing
von: Ju. D. Filatov, et al.
Veröffentlicht: (2016)

Formation of flat surfaces of optoelectronic components in diamond polishing
von: Ju. D. Filatov, et al.
Veröffentlicht: (2017)

Polished surface roughness of optoelectronic components made of monocrystalline materials
von: Ju. Filatov, et al.
Veröffentlicht: (2016)

Surface roughness of optoelectronic components in mechanical polishing
von: Ju. D. Filatov
Veröffentlicht: (2018)

Influence of parameters of structure of the processed material on polishing indicators optical surfaces
von: Yu. D. Filatov, et al.
Veröffentlicht: (2021)

Influence of spectroscopic parameters of the processed material and polishing powder for polishing of optical surfaces
von: Yu. D. Filatov, et al.
Veröffentlicht: (2022)

Formation and localization of deposit from wear of polishing powder nanoparticles on treated surface during polishing of polymer optical materials
von: Yu. D. Filatov, et al.
Veröffentlicht: (2024)

Education of sludge particles and wear particles polishing powder in the polishing process nitride aluminum
von: Ju. D. Filatov, et al.
Veröffentlicht: (2017)

Influence of dielectric characteristics of the processed material, polishing powder and dispersed system on the energy of their interaction during polishing of optical surfaces
von: Yu. D. Filatov, et al.
Veröffentlicht: (2022)

Interaction between debris particles and polishing powder wear particles in polishing optoelectronic components
von: Ju. D. Filatov
Veröffentlicht: (2018)

Efficiency of polishing of anisotropic single-crystal materials for optoelectronics
von: Ju. Filatov, et al.
Veröffentlicht: (2016)

Transfer energy during the interaction of the optical surface with the polishing dispersion system
von: Yu. D. Filatov, et al.
Veröffentlicht: (2022)

Influence of inter-molecular interaction of particles of polishing powder with the processed material on indicators of polishing of optical surfaces
von: Yu. D. Filatov, et al.
Veröffentlicht: (2021)

Polishing of precision surfaces of optoelectronic technology elements from glass, sitals, optical and semiconductor crystals. Review
von: Yu. D. Filatov
Veröffentlicht: (2020)

Roughness of polished surfaces of optoelectronic elements made of polymeric optical materials
von: Yu. D. Filatov, et al.
Veröffentlicht: (2023)

The microelectronic inductive balanced sensors with coils of square and triangular shape
von: O. N. Negodenko, et al.
Veröffentlicht: (2002)

Material removal rate in polishing of polymer optical materials
von: Yu. D. Filatov, et al.
Veröffentlicht: (2022)

Effect of rheological properties of dispersed system on polishing indicators of optical glass and glassceramics
von: Yu. D. Filatov, et al.
Veröffentlicht: (2021)

Polishing substrates of single crystal silicon carbide and sapphire for optoelectronics
von: Filatov, O.Yu., et al.
Veröffentlicht: (2016)

Diamond polishing of crystalline materials for optoelectronics
von: Ju. D. Filatov
Veröffentlicht: (2017)

Interaction of sludge particles and wear particles of polishing powder during polishing of polymeric optical materials
von: Yu. D. Filatov, et al.
Veröffentlicht: (2023)

New regularities of polishing surfaces of parts made of non-metallic materials
von: Yu. D. Filatov
Veröffentlicht: (2023)

Thermal simulation of heterogeneous structural components in microelectronic devices
von: V. I. Gavrysh, et al.
Veröffentlicht: (2010)

Thermal simulation of heterogeneous structural components in microelectronic devices
von: Gavrysh, V.I., et al.
Veröffentlicht: (2010)

A mechanism of diamond-abrasive finishing of monocrystalline silicon carbide
von: Ju. D. Filatov, et al.
Veröffentlicht: (2013)

Optical processes in silicon and microelectronic structures based thereon upon interaction with high-energy radiation
von: Volkov, V.G., et al.
Veröffentlicht: (2003)

Separate determination of thickness and optical parameters by surface plasmon resonance: accuracy consideration
von: Rengevych, O.V., et al.
Veröffentlicht: (1999)

Polishing of opto-electronic equipment elements from single-crystal silicon carbide
von: Ju. D. Filatov, et al.
Veröffentlicht: (2015)

Material removal rate in polishing polymethymethacrylate parts
von: Yu. D. Filatov
Veröffentlicht: (2024)

Microelectronic multi_parametrical biosensors
von: M. F. Starodub, et al.
Veröffentlicht: (2008)

Assembly technology and design features of microelectronic coordinate-sensitive detectors
von: V. P. Sidorenko, et al.
Veröffentlicht: (2018)

Fatigue of NPP Components and Piping under Service Conditions
von: Filatov, V.M.
Veröffentlicht: (2004)

Relationship of transfer coefficients with transfer energy during polishing of non-metallic materials
von: Yu. D. Filatov
Veröffentlicht: (2022)

About accuracy of economic indicators
von: Ju. Arkhangelskij
Veröffentlicht: (2013)

Innovative microelectronic technologies for high-energy physics experiments
von: Borshchov, V.M., et al.
Veröffentlicht: (2017)

Ion beam system for nanotrimming of functional microelectronics layers
von: Bizyukov, A.A., et al.
Veröffentlicht: (2011)

Flat Chiral Irises in a Square Waveguide and Displays of “Optical Activity”
von: Kolmakova, N. G., et al.
Veröffentlicht: (2012)

Organization of the Operating Environment for Industrial Robots Processing Flat Objects That Have Asymmetry of Part Surfaces
von: A. K. Karmalita, et al.
Veröffentlicht: (2024)

The shaping of the Ukrainian content on the Polish Radio in 1930s
von: M. Romaniuk
Veröffentlicht: (2019)

OPTICAL SENSOR FOR SURFACE PROFILE MONITORING OF PARABOLIC ANTENNA FOR MILLIMETER AND SUBMILLIMETER ASTRONOMY
von: Chechetkin, D. L., et al.
Veröffentlicht: (2016)