Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing
Збережено в:
Дата: | 2021 |
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Автори: | , , , , , |
Формат: | Стаття |
Мова: | English |
Опубліковано: |
2021
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Назва видання: | Superhard Materials |
Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0001235610 |
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Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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open-sciencenbuvgovua-46742024-02-25T16:04:19Z Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing F. Deng C. Hao Zh. Guo Sh. Wang X. Bo Q. Lei 0203-3119 2021 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0001235610 Article |
institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
collection |
Open-Science |
language |
English |
series |
Superhard Materials |
spellingShingle |
Superhard Materials F. Deng C. Hao Zh. Guo Sh. Wang X. Bo Q. Lei Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
format |
Article |
author |
F. Deng C. Hao Zh. Guo Sh. Wang X. Bo Q. Lei |
author_facet |
F. Deng C. Hao Zh. Guo Sh. Wang X. Bo Q. Lei |
author_sort |
F. Deng |
title |
Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
title_short |
Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
title_full |
Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
title_fullStr |
Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
title_full_unstemmed |
Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
title_sort |
simulation study on airflow field uniformity of hfcvd deposition system by filament spacing |
publishDate |
2021 |
url |
http://jnas.nbuv.gov.ua/article/UJRN-0001235610 |
work_keys_str_mv |
AT fdeng simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing AT chao simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing AT zhguo simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing AT shwang simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing AT xbo simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing AT qlei simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing |
first_indexed |
2024-03-30T06:32:07Z |
last_indexed |
2024-03-30T06:32:07Z |
_version_ |
1796877754625425408 |