Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing

Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing

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Bibliographic Details
Date:2021
Main Authors: F. Deng, C. Hao, Zh. Guo, Sh. Wang, X. Bo, Q. Lei
Format: Article
Language:English
Published: 2021
Series:Superhard Materials
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0001235610
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-4674
record_format dspace
spelling open-sciencenbuvgovua-46742024-02-25T16:04:19Z Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing F. Deng C. Hao Zh. Guo Sh. Wang X. Bo Q. Lei 0203-3119 2021 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0001235610 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Superhard Materials
spellingShingle Superhard Materials
F. Deng
C. Hao
Zh. Guo
Sh. Wang
X. Bo
Q. Lei
Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing
format Article
author F. Deng
C. Hao
Zh. Guo
Sh. Wang
X. Bo
Q. Lei
author_facet F. Deng
C. Hao
Zh. Guo
Sh. Wang
X. Bo
Q. Lei
author_sort F. Deng
title Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing
title_short Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing
title_full Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing
title_fullStr Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing
title_full_unstemmed Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing
title_sort simulation study on airflow field uniformity of hfcvd deposition system by filament spacing
publishDate 2021
url http://jnas.nbuv.gov.ua/article/UJRN-0001235610
work_keys_str_mv AT fdeng simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing
AT chao simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing
AT zhguo simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing
AT shwang simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing
AT xbo simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing
AT qlei simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing
first_indexed 2025-07-17T11:06:26Z
last_indexed 2025-07-17T11:06:26Z
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