Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing

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Бібліографічні деталі
Дата:2021
Автори: F. Deng, C. Hao, Zh. Guo, Sh. Wang, X. Bo, Q. Lei
Формат: Стаття
Мова:English
Опубліковано: 2021
Назва видання:Superhard Materials
Онлайн доступ:http://jnas.nbuv.gov.ua/article/UJRN-0001235610
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-46742024-02-25T16:04:19Z Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing F. Deng C. Hao Zh. Guo Sh. Wang X. Bo Q. Lei 0203-3119 2021 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0001235610 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Superhard Materials
spellingShingle Superhard Materials
F. Deng
C. Hao
Zh. Guo
Sh. Wang
X. Bo
Q. Lei
Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing
format Article
author F. Deng
C. Hao
Zh. Guo
Sh. Wang
X. Bo
Q. Lei
author_facet F. Deng
C. Hao
Zh. Guo
Sh. Wang
X. Bo
Q. Lei
author_sort F. Deng
title Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing
title_short Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing
title_full Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing
title_fullStr Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing
title_full_unstemmed Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing
title_sort simulation study on airflow field uniformity of hfcvd deposition system by filament spacing
publishDate 2021
url http://jnas.nbuv.gov.ua/article/UJRN-0001235610
work_keys_str_mv AT fdeng simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing
AT chao simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing
AT zhguo simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing
AT shwang simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing
AT xbo simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing
AT qlei simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing
first_indexed 2024-03-30T06:32:07Z
last_indexed 2024-03-30T06:32:07Z
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