Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing
Saved in:
| Date: | 2021 |
|---|---|
| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2021
|
| Series: | Superhard Materials |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0001235610 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Institution
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859483999531958272 |
|---|---|
| author | F. Deng C. Hao Zh. Guo Sh. Wang X. Bo Q. Lei |
| author_facet | F. Deng C. Hao Zh. Guo Sh. Wang X. Bo Q. Lei |
| author_sort | F. Deng |
| collection | Open-Science |
| first_indexed | 2025-07-17T11:06:26Z |
| format | Article |
| id | open-sciencenbuvgovua-4674 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T11:06:26Z |
| publishDate | 2021 |
| record_format | dspace |
| series | Superhard Materials |
| spelling | open-sciencenbuvgovua-46742024-02-25T16:04:19Z Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing F. Deng C. Hao Zh. Guo Sh. Wang X. Bo Q. Lei 0203-3119 2021 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0001235610 Article |
| spellingShingle | Superhard Materials F. Deng C. Hao Zh. Guo Sh. Wang X. Bo Q. Lei Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
| title | Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
| title_full | Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
| title_fullStr | Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
| title_full_unstemmed | Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
| title_short | Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
| title_sort | simulation study on airflow field uniformity of hfcvd deposition system by filament spacing |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001235610 |
| work_keys_str_mv | AT fdeng simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing AT chao simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing AT zhguo simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing AT shwang simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing AT xbo simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing AT qlei simulationstudyonairflowfielduniformityofhfcvddepositionsystembyfilamentspacing |