Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing
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| Datum: | 2021 |
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| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2021
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| Schriftenreihe: | Superhard Materials |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0001235610 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859483999531958272 |
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| author | F. Deng C. Hao Zh. Guo Sh. Wang X. Bo Q. Lei |
| author_facet | F. Deng C. Hao Zh. Guo Sh. Wang X. Bo Q. Lei |
| author_sort | F. Deng |
| collection | Open-Science |
| first_indexed | 2025-07-17T11:06:26Z |
| format | Article |
| id | open-sciencenbuvgovua-4674 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-17T11:06:26Z |
| publishDate | 2021 |
| record_format | dspace |
| series | Superhard Materials |
| spelling | open-sciencenbuvgovua-46742024-02-25T16:04:19Z Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing F. Deng C. Hao Zh. Guo Sh. Wang X. Bo Q. Lei 0203-3119 2021 en Superhard Materials http://jnas.nbuv.gov.ua/article/UJRN-0001235610 Article |
| spellingShingle | Superhard Materials F. Deng C. Hao Zh. Guo Sh. Wang X. Bo Q. Lei Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
| title | Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
| title_full | Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
| title_fullStr | Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
| title_full_unstemmed | Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
| title_short | Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing |
| title_sort | simulation study on airflow field uniformity of hfcvd deposition system by filament spacing |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0001235610 |
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