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Simulation study on airflow field uniformity of HFCVD deposition system by filament spacing

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Bibliographic Details
Date:	2021
Main Authors:	F. Deng, C. Hao, Zh. Guo, Sh. Wang, X. Bo, Q. Lei
Format:	Article
Language:	English
Published:	2021
Series:	Superhard Materials
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0001235610
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Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS

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