About ultrasound-stimulated a self-organization of defect structures in semiconductors during ion implantation
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| Date: | 2013 |
|---|---|
| Main Author: | Ya. M. Olikh |
| Format: | Article |
| Language: | English |
| Published: |
2013
|
| Series: | Optoelectronics and Semiconductor Technique |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000363128 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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