Methods and mechanisms of gettering of silicon structures in the production of integrated circuits

Methods and mechanisms of gettering of silicon structures in the production of integrated circuits

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Bibliographic Details
Date:2013
Main Authors: V. A. Pilipenko, V. A. Gorushko, A. N. Petlitskij, V. V. Ponarjadov, A. S. Turtsevich, S. V. Shvedov
Format: Article
Language:English
Published: 2013
Series:Technology and design in electronic equipment
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000405014
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-84501
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spelling open-sciencenbuvgovua-845012024-04-16T18:39:08Z Methods and mechanisms of gettering of silicon structures in the production of integrated circuits V. A. Pilipenko V. A. Gorushko A. N. Petlitskij V. V. Ponarjadov A. S. Turtsevich S. V. Shvedov 2225-5818 2013 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0000405014 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Technology and design in electronic equipment
spellingShingle Technology and design in electronic equipment
V. A. Pilipenko
V. A. Gorushko
A. N. Petlitskij
V. V. Ponarjadov
A. S. Turtsevich
S. V. Shvedov
Methods and mechanisms of gettering of silicon structures in the production of integrated circuits
format Article
author V. A. Pilipenko
V. A. Gorushko
A. N. Petlitskij
V. V. Ponarjadov
A. S. Turtsevich
S. V. Shvedov
author_facet V. A. Pilipenko
V. A. Gorushko
A. N. Petlitskij
V. V. Ponarjadov
A. S. Turtsevich
S. V. Shvedov
author_sort V. A. Pilipenko
title Methods and mechanisms of gettering of silicon structures in the production of integrated circuits
title_short Methods and mechanisms of gettering of silicon structures in the production of integrated circuits
title_full Methods and mechanisms of gettering of silicon structures in the production of integrated circuits
title_fullStr Methods and mechanisms of gettering of silicon structures in the production of integrated circuits
title_full_unstemmed Methods and mechanisms of gettering of silicon structures in the production of integrated circuits
title_sort methods and mechanisms of gettering of silicon structures in the production of integrated circuits
publishDate 2013
url http://jnas.nbuv.gov.ua/article/UJRN-0000405014
work_keys_str_mv AT vapilipenko methodsandmechanismsofgetteringofsiliconstructuresintheproductionofintegratedcircuits
AT vagorushko methodsandmechanismsofgetteringofsiliconstructuresintheproductionofintegratedcircuits
AT anpetlitskij methodsandmechanismsofgetteringofsiliconstructuresintheproductionofintegratedcircuits
AT vvponarjadov methodsandmechanismsofgetteringofsiliconstructuresintheproductionofintegratedcircuits
AT asturtsevich methodsandmechanismsofgetteringofsiliconstructuresintheproductionofintegratedcircuits
AT svshvedov methodsandmechanismsofgetteringofsiliconstructuresintheproductionofintegratedcircuits
first_indexed 2025-07-22T10:19:17Z
last_indexed 2025-07-22T10:19:17Z
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