Methods and mechanisms of gettering of silicon structures in the production of integrated circuits
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| Datum: | 2013 |
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| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
2013
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| Schriftenreihe: | Technology and design in electronic equipment |
| Online Zugang: | http://jnas.nbuv.gov.ua/article/UJRN-0000405014 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859539187000147968 |
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| author | V. A. Pilipenko V. A. Gorushko A. N. Petlitskij V. V. Ponarjadov A. S. Turtsevich S. V. Shvedov |
| author_facet | V. A. Pilipenko V. A. Gorushko A. N. Petlitskij V. V. Ponarjadov A. S. Turtsevich S. V. Shvedov |
| author_sort | V. A. Pilipenko |
| collection | Open-Science |
| first_indexed | 2025-07-22T10:19:17Z |
| format | Article |
| id | open-sciencenbuvgovua-84501 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T10:19:17Z |
| publishDate | 2013 |
| record_format | dspace |
| series | Technology and design in electronic equipment |
| spelling | open-sciencenbuvgovua-845012024-04-16T18:39:08Z Methods and mechanisms of gettering of silicon structures in the production of integrated circuits V. A. Pilipenko V. A. Gorushko A. N. Petlitskij V. V. Ponarjadov A. S. Turtsevich S. V. Shvedov 2225-5818 2013 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0000405014 Article |
| spellingShingle | Technology and design in electronic equipment V. A. Pilipenko V. A. Gorushko A. N. Petlitskij V. V. Ponarjadov A. S. Turtsevich S. V. Shvedov Methods and mechanisms of gettering of silicon structures in the production of integrated circuits |
| title | Methods and mechanisms of gettering of silicon structures in the production of integrated circuits |
| title_full | Methods and mechanisms of gettering of silicon structures in the production of integrated circuits |
| title_fullStr | Methods and mechanisms of gettering of silicon structures in the production of integrated circuits |
| title_full_unstemmed | Methods and mechanisms of gettering of silicon structures in the production of integrated circuits |
| title_short | Methods and mechanisms of gettering of silicon structures in the production of integrated circuits |
| title_sort | methods and mechanisms of gettering of silicon structures in the production of integrated circuits |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000405014 |
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