Methods and mechanisms of gettering of silicon structures in the production of integrated circuits
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| Date: | 2013 |
|---|---|
| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
2013
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| Series: | Technology and design in electronic equipment |
| Online Access: | http://jnas.nbuv.gov.ua/article/UJRN-0000405014 |
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| Journal Title: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859539187000147968 |
|---|---|
| author | V. A. Pilipenko V. A. Gorushko A. N. Petlitskij V. V. Ponarjadov A. S. Turtsevich S. V. Shvedov |
| author_facet | V. A. Pilipenko V. A. Gorushko A. N. Petlitskij V. V. Ponarjadov A. S. Turtsevich S. V. Shvedov |
| author_sort | V. A. Pilipenko |
| collection | Open-Science |
| first_indexed | 2025-07-22T10:19:17Z |
| format | Article |
| id | open-sciencenbuvgovua-84501 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T10:19:17Z |
| publishDate | 2013 |
| record_format | dspace |
| series | Technology and design in electronic equipment |
| spelling | open-sciencenbuvgovua-845012024-04-16T18:39:08Z Methods and mechanisms of gettering of silicon structures in the production of integrated circuits V. A. Pilipenko V. A. Gorushko A. N. Petlitskij V. V. Ponarjadov A. S. Turtsevich S. V. Shvedov 2225-5818 2013 en Technology and design in electronic equipment http://jnas.nbuv.gov.ua/article/UJRN-0000405014 Article |
| spellingShingle | Technology and design in electronic equipment V. A. Pilipenko V. A. Gorushko A. N. Petlitskij V. V. Ponarjadov A. S. Turtsevich S. V. Shvedov Methods and mechanisms of gettering of silicon structures in the production of integrated circuits |
| title | Methods and mechanisms of gettering of silicon structures in the production of integrated circuits |
| title_full | Methods and mechanisms of gettering of silicon structures in the production of integrated circuits |
| title_fullStr | Methods and mechanisms of gettering of silicon structures in the production of integrated circuits |
| title_full_unstemmed | Methods and mechanisms of gettering of silicon structures in the production of integrated circuits |
| title_short | Methods and mechanisms of gettering of silicon structures in the production of integrated circuits |
| title_sort | methods and mechanisms of gettering of silicon structures in the production of integrated circuits |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000405014 |
| work_keys_str_mv | AT vapilipenko methodsandmechanismsofgetteringofsiliconstructuresintheproductionofintegratedcircuits AT vagorushko methodsandmechanismsofgetteringofsiliconstructuresintheproductionofintegratedcircuits AT anpetlitskij methodsandmechanismsofgetteringofsiliconstructuresintheproductionofintegratedcircuits AT vvponarjadov methodsandmechanismsofgetteringofsiliconstructuresintheproductionofintegratedcircuits AT asturtsevich methodsandmechanismsofgetteringofsiliconstructuresintheproductionofintegratedcircuits AT svshvedov methodsandmechanismsofgetteringofsiliconstructuresintheproductionofintegratedcircuits |