Cover Image

Methods and mechanisms of gettering of silicon structures in the production of integrated circuits

Saved in:

Bibliographic Details
Date:	2013
Main Authors:	V. A. Pilipenko, V. A. Gorushko, A. N. Petlitskij, V. V. Ponarjadov, A. S. Turtsevich, S. V. Shvedov
Format:	Article
Language:	English
Published:	2013
Series:	Technology and design in electronic equipment
Online Access:	http://jnas.nbuv.gov.ua/article/UJRN-0000405014
Tags:	Add Tag No Tags, Be the first to tag this record!
Journal Title:	Library portal of National Academy of Sciences of Ukraine \| LibNAS

Institution

Library portal of National Academy of Sciences of Ukraine | LibNAS

Similar Items

Investigations of impurity gettering in multicrystalline silicon
by: Evtukh, A.A., et al.
Published: (2001)

Increase of planar homogeneity of multi-silicon structures by gettering treatments
by: Litovchenko, V.G., et al.
Published: (2001)

Hydrogen gettering in annealed oxygen-implanted silicon
by: A. Misiuk, et al.
Published: (2010)

Enhancing parameters of silicon varactors using laser gettering
by: I. M. Vikulin, et al.
Published: (2018)

Two-channel gettering of recombination-active impurity in polycrystalline solar silicon
by: V. G. Litovchenko, et al.
Published: (2012)

Two-channel gettering of recombination-active impurity in polycrystalline solar silicon
by: V. H. Lytovchenko, et al.
Published: (2012)

Characteristics of gettering process in multicrystalline Si wafers with combined porous Si/Al getters
by: A. Sarikov, et al.
Published: (2012)

Методы и механизмы геттерирования кремниевых структур в производстве интегральных микросхем
by: Pilipenko, V. A., et al.
Published: (2013)

Effect of getter additions on hydrogen- induced embrittlement of welded joints on structural materials of NPP equipment
by: V. M. Azhazha, et al.
Published: (2010)

Influence of plasma treatment on erosion haracteristics and structure of reversible hydrogen getters
by: Borisko, V.N., et al.
Published: (2000)

Influence of gettering on aluminum ohmic contact formation
by: V. N. Litvinenko, et al.
Published: (2020)

On features of deoxidization of CsI melt with zirconium getter
by: Datsko, Yu.N., et al.
Published: (2016)

Мировые тенденции развития микроэлектроники и место Республики Беларусь в этом процессе
by: Belous, A. I., et al.
Published: (2012)

Improvement of the reverse characteristics of Schottky diodes using gettering
by: Litvinenko, V.N., et al.
Published: (2019)

Improvement of the reverse characteristics of Schottky diodes using gettering
by: V. N. Litvinenko, et al.
Published: (2019)

Improving parameters of planar pulse diode using gettering
by: V. M. Lytvynenko, et al.
Published: (2021)

Influence of modifying method and silicon content on ductile cast iron structure and mechanical properties
by: A. A. Jasinskij, et al.
Published: (2015)

Mechanical strain in the structure of array of silicon nanowires grown on a silicon substrate
by: A. I. Klimovskaya, et al.
Published: (2019)

Mechanical strain in the structure of an array of silicon nanowires grown on a silicon substrate
by: Klimovskaya, A.I., et al.
Published: (2019)

Joint using methods of structural decomposition for optimizing circuit of Moore FSM
by: A. A. Barkalov, et al.
Published: (2021)

The formation of isolating and gettering layers in semiconductors with use of medium energy proton implantation
by: F. F. Komarov, et al.
Published: (2008)

Search for the optimal size of printed circuit boards for mechanical structures for electronic equipment
by: A. A. Efimenko, et al.
Published: (2014)

Integral models in the problems of analysis of electrical circuits
by: A. F. Verlan, et al.
Published: (2016)

Fuzzy neural network for integrated circuit layout analysis
by: A. A. Dudkin
Published: (2015)

Influence of Zr-Fe getter filter on Cd and Zn deep refining of interstitial impurities
by: Kondrik, A.I., et al.
Published: (2014)

Assessment of the ecological safety of the enterprises in the production of circuit boards and electroplating
by: A. A. Nester
Published: (2017)

Mechanism of tin-induced crystallization in amorphous silicon
by: V. B. Neimash, et al.
Published: (2014)

Current transport mechanisms in metal - high-k dielectric - silicon structures
by: Y. V. Gomeniuk
Published: (2012)

Mechanism of tin-induced crystallization in amorphous silicon
by: V. B. Neimash, et al.
Published: (2014)

Growing the epitaxial undoped and N-doped ZnO films by radical beam gettering epitaxy
by: Rogozin, I.V.
Published: (2006)

Refining of Cd and Zn from interstitial impurities using distillation with a ZrFe getter filter
by: A. I. Kondrik, et al.
Published: (2013)

Model-driven development of digital system algorithms on programmable logic integrated circuits
by: O. O. Letychevskyi, et al.
Published: (2020)

Analysis of features of recombination mechanisms in silicon solar cells
by: R. M. Korkishko, et al.
Published: (2014)

Analysis of features of recombination mechanisms in silicon solar cells
by: Korkishko, R.M., et al.
Published: (2014)

Automation of digital filter circuit structural transformations
by: V. S. Sitnikov, et al.
Published: (2002)

Study of desorption process from the Zr (62) – Ni (38 wt.%) non-evaporable getter
by: Aksyonova, G.N., et al.
Published: (2017)

Detonation coatings of ferromolybdenum-silicon carbide composite powder produced by the method of mechanical-chemical synthesis
by: Ju. S. Borisov, et al.
Published: (2014)

Block of an electron gun combined with a getter - ion pump designed for high - power beam - plasma microwave devices
by: Antonov, A.N., et al.
Published: (2008)

Monitoring improvement of technical condition of high-voltage circuit breaker mechanical elements
by: A. V. Panov, et al.
Published: (2018)

Integration mechanisms of development of Ukrainian market of bread and bakery products
by: O. V. Nikishyna, et al.
Published: (2018)