Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy
Збережено в:
| Дата: | 2011 |
|---|---|
| Автори: | , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
2011
|
| Назва видання: | Nanosystems, nanomaterials, nanotechnologies |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000473640 |
| Теги: |
Додати тег
Немає тегів, Будьте першим, хто поставить тег для цього запису!
|
| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| _version_ | 1859601048657723392 |
|---|---|
| author | N. I. Khodakovskij Ju. Larkin G. G. Galstjan |
| author_facet | N. I. Khodakovskij Ju. Larkin G. G. Galstjan |
| author_sort | N. I. Khodakovskij |
| collection | Open-Science |
| first_indexed | 2025-07-22T14:32:24Z |
| format | Article |
| id | open-sciencenbuvgovua-97347 |
| institution | Library portal of National Academy of Sciences of Ukraine | LibNAS |
| language | English |
| last_indexed | 2025-07-22T14:32:24Z |
| publishDate | 2011 |
| record_format | dspace |
| series | Nanosystems, nanomaterials, nanotechnologies |
| spelling | open-sciencenbuvgovua-973472024-04-17T17:34:04Z Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy N. I. Khodakovskij Ju. Larkin G. G. Galstjan 1816-5230 2011 en Nanosystems, nanomaterials, nanotechnologies http://jnas.nbuv.gov.ua/article/UJRN-0000473640 Article |
| spellingShingle | Nanosystems, nanomaterials, nanotechnologies N. I. Khodakovskij Ju. Larkin G. G. Galstjan Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy |
| title | Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy |
| title_full | Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy |
| title_fullStr | Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy |
| title_full_unstemmed | Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy |
| title_short | Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy |
| title_sort | study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy |
| url | http://jnas.nbuv.gov.ua/article/UJRN-0000473640 |
| work_keys_str_mv | AT nikhodakovskij studyofprobemethodsforfabricationofunitsfornanoelectronicdevicesanddiagnostictechniqueusingelectrostaticforcemicroscopy AT jularkin studyofprobemethodsforfabricationofunitsfornanoelectronicdevicesanddiagnostictechniqueusingelectrostaticforcemicroscopy AT gggalstjan studyofprobemethodsforfabricationofunitsfornanoelectronicdevicesanddiagnostictechniqueusingelectrostaticforcemicroscopy |