Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy
Збережено в:
| Дата: | 2011 |
|---|---|
| Автори: | , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2011
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| Назва видання: | Nanosystems, nanomaterials, nanotechnologies |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000473640 |
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| Назва журналу: | Library portal of National Academy of Sciences of Ukraine | LibNAS |
Репозитарії
Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-97347 |
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| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-973472024-04-17T17:34:04Z Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy N. I. Khodakovskij Ju. Larkin G. G. Galstjan 1816-5230 2011 en Nanosystems, nanomaterials, nanotechnologies http://jnas.nbuv.gov.ua/article/UJRN-0000473640 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Nanosystems, nanomaterials, nanotechnologies |
| spellingShingle |
Nanosystems, nanomaterials, nanotechnologies N. I. Khodakovskij Ju. Larkin G. G. Galstjan Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy |
| format |
Article |
| author |
N. I. Khodakovskij Ju. Larkin G. G. Galstjan |
| author_facet |
N. I. Khodakovskij Ju. Larkin G. G. Galstjan |
| author_sort |
N. I. Khodakovskij |
| title |
Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy |
| title_short |
Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy |
| title_full |
Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy |
| title_fullStr |
Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy |
| title_full_unstemmed |
Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy |
| title_sort |
study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy |
| publishDate |
2011 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000473640 |
| work_keys_str_mv |
AT nikhodakovskij studyofprobemethodsforfabricationofunitsfornanoelectronicdevicesanddiagnostictechniqueusingelectrostaticforcemicroscopy AT jularkin studyofprobemethodsforfabricationofunitsfornanoelectronicdevicesanddiagnostictechniqueusingelectrostaticforcemicroscopy AT gggalstjan studyofprobemethodsforfabricationofunitsfornanoelectronicdevicesanddiagnostictechniqueusingelectrostaticforcemicroscopy |
| first_indexed |
2024-04-18T05:29:32Z |
| last_indexed |
2024-04-18T05:29:32Z |
| _version_ |
1796887437807452160 |