Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy

Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy

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Bibliographic Details
Date:2011
Main Authors: N. I. Khodakovskij, Ju. Larkin, G. G. Galstjan
Format: Article
Language:English
Published: 2011
Series:Nanosystems, nanomaterials, nanotechnologies
Online Access:http://jnas.nbuv.gov.ua/article/UJRN-0000473640
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Journal Title:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
id open-sciencenbuvgovua-97347
record_format dspace
spelling open-sciencenbuvgovua-973472024-04-17T17:34:04Z Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy N. I. Khodakovskij Ju. Larkin G. G. Galstjan 1816-5230 2011 en Nanosystems, nanomaterials, nanotechnologies http://jnas.nbuv.gov.ua/article/UJRN-0000473640 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Nanosystems, nanomaterials, nanotechnologies
spellingShingle Nanosystems, nanomaterials, nanotechnologies
N. I. Khodakovskij
Ju. Larkin
G. G. Galstjan
Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy
format Article
author N. I. Khodakovskij
Ju. Larkin
G. G. Galstjan
author_facet N. I. Khodakovskij
Ju. Larkin
G. G. Galstjan
author_sort N. I. Khodakovskij
title Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy
title_short Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy
title_full Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy
title_fullStr Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy
title_full_unstemmed Study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy
title_sort study of probe methods for fabrication of units for nanoelectronic devices and diagnostic technique using electrostatic force microscopy
publishDate 2011
url http://jnas.nbuv.gov.ua/article/UJRN-0000473640
work_keys_str_mv AT nikhodakovskij studyofprobemethodsforfabricationofunitsfornanoelectronicdevicesanddiagnostictechniqueusingelectrostaticforcemicroscopy
AT jularkin studyofprobemethodsforfabricationofunitsfornanoelectronicdevicesanddiagnostictechniqueusingelectrostaticforcemicroscopy
AT gggalstjan studyofprobemethodsforfabricationofunitsfornanoelectronicdevicesanddiagnostictechniqueusingelectrostaticforcemicroscopy
first_indexed 2025-07-22T14:32:24Z
last_indexed 2025-07-22T14:32:24Z
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