The process of forming the polycrystalline silicon wafer from the powder raw material and analyzing the impurity composition of their surface
Збережено в:
| Дата: | 2011 |
|---|---|
| Автори: | , , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
2011
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| Назва видання: | Physical surface engineering |
| Онлайн доступ: | http://jnas.nbuv.gov.ua/article/UJRN-0000889687 |
| Теги: |
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Library portal of National Academy of Sciences of Ukraine | LibNAS| id |
open-sciencenbuvgovua-98622 |
|---|---|
| record_format |
dspace |
| spelling |
open-sciencenbuvgovua-986222024-04-17T17:43:12Z The process of forming the polycrystalline silicon wafer from the powder raw material and analyzing the impurity composition of their surface R. Aliev L. Olimov E. Mukhtarov Zh. Alieva 1999-8074 2011 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000889687 Article |
| institution |
Library portal of National Academy of Sciences of Ukraine | LibNAS |
| collection |
Open-Science |
| language |
English |
| series |
Physical surface engineering |
| spellingShingle |
Physical surface engineering R. Aliev L. Olimov E. Mukhtarov Zh. Alieva The process of forming the polycrystalline silicon wafer from the powder raw material and analyzing the impurity composition of their surface |
| format |
Article |
| author |
R. Aliev L. Olimov E. Mukhtarov Zh. Alieva |
| author_facet |
R. Aliev L. Olimov E. Mukhtarov Zh. Alieva |
| author_sort |
R. Aliev |
| title |
The process of forming the polycrystalline silicon wafer from the powder raw material and analyzing the impurity composition of their surface |
| title_short |
The process of forming the polycrystalline silicon wafer from the powder raw material and analyzing the impurity composition of their surface |
| title_full |
The process of forming the polycrystalline silicon wafer from the powder raw material and analyzing the impurity composition of their surface |
| title_fullStr |
The process of forming the polycrystalline silicon wafer from the powder raw material and analyzing the impurity composition of their surface |
| title_full_unstemmed |
The process of forming the polycrystalline silicon wafer from the powder raw material and analyzing the impurity composition of their surface |
| title_sort |
process of forming the polycrystalline silicon wafer from the powder raw material and analyzing the impurity composition of their surface |
| publishDate |
2011 |
| url |
http://jnas.nbuv.gov.ua/article/UJRN-0000889687 |
| work_keys_str_mv |
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2024-04-18T05:34:45Z |
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2024-04-18T05:34:45Z |
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