The process of forming the polycrystalline silicon wafer from the powder raw material and analyzing the impurity composition of their surface

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Datum:2011
Hauptverfasser: R. Aliev, L. Olimov, E. Mukhtarov, Zh. Alieva
Format: Artikel
Sprache:English
Veröffentlicht: 2011
Schriftenreihe:Physical surface engineering
Online Zugang:http://jnas.nbuv.gov.ua/article/UJRN-0000889687
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Назва журналу:Library portal of National Academy of Sciences of Ukraine | LibNAS

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Library portal of National Academy of Sciences of Ukraine | LibNAS
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spelling open-sciencenbuvgovua-986222024-04-17T17:43:12Z The process of forming the polycrystalline silicon wafer from the powder raw material and analyzing the impurity composition of their surface R. Aliev L. Olimov E. Mukhtarov Zh. Alieva 1999-8074 2011 en Physical surface engineering http://jnas.nbuv.gov.ua/article/UJRN-0000889687 Article
institution Library portal of National Academy of Sciences of Ukraine | LibNAS
collection Open-Science
language English
series Physical surface engineering
spellingShingle Physical surface engineering
R. Aliev
L. Olimov
E. Mukhtarov
Zh. Alieva
The process of forming the polycrystalline silicon wafer from the powder raw material and analyzing the impurity composition of their surface
format Article
author R. Aliev
L. Olimov
E. Mukhtarov
Zh. Alieva
author_facet R. Aliev
L. Olimov
E. Mukhtarov
Zh. Alieva
author_sort R. Aliev
title The process of forming the polycrystalline silicon wafer from the powder raw material and analyzing the impurity composition of their surface
title_short The process of forming the polycrystalline silicon wafer from the powder raw material and analyzing the impurity composition of their surface
title_full The process of forming the polycrystalline silicon wafer from the powder raw material and analyzing the impurity composition of their surface
title_fullStr The process of forming the polycrystalline silicon wafer from the powder raw material and analyzing the impurity composition of their surface
title_full_unstemmed The process of forming the polycrystalline silicon wafer from the powder raw material and analyzing the impurity composition of their surface
title_sort process of forming the polycrystalline silicon wafer from the powder raw material and analyzing the impurity composition of their surface
publishDate 2011
url http://jnas.nbuv.gov.ua/article/UJRN-0000889687
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