Електрофiзичнi характеристики приповерхневих шарiв кристалiв Si p-типу, з напиленими плiвками Al, пiдданих пружнiй деформацiї
The deposition of Al film onto the (111) surface of a p-Si crystal was shown to induce a deformation in the near-surface layer of the latter. Provided that the crystal strain is elastic and uniaxial, the gettering of defects in the near-surface layer is observed, which is confirmed by a change in th...
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| Datum: | 2018 |
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| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | English Ukrainian |
| Veröffentlicht: |
Publishing house "Academperiodika"
2018
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| Schlagworte: | |
| Online Zugang: | https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2018346 |
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| Назва журналу: | Ukrainian Journal of Physics |