Вплив олова на структурнi перетворення тонкоплiвкової субоксидної матрицi кремнiю
The processes of crystallization of amorphous silicon (a-Si) in the a-SiOxSn (1 ≤ x ≤ 2) sub-oxide matrix have been studied. The temperature, at which the crystallization begins, is shown to be lower for a-SiOxSn films with higher tin contents. For specimens with the maximum tin content (about 2 vol...
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| Date: | 2019 |
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| Main Authors: | , , , , , , , , |
| Format: | Article |
| Language: | English Ukrainian |
| Published: |
Publishing house "Academperiodika"
2019
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| Subjects: | |
| Online Access: | https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2019014 |
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| Journal Title: | Ukrainian Journal of Physics |