Особливості формування омічних контактів до n+-InN

• Datum: 2019
• Hauptverfasser: Sai, P. O., Safryuk-Romanenko, N. V., But, D. B., Cywiński, G., Boltovets, N. S., Brunkov, P. N., Jmeric, N. V., Ivanov, S. V., Shynkarenko, V. V.
• Format: Artikel
• Sprache: English
• Veröffentlicht: Publishing house "Academperiodika" 2019
• Online Zugang: https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2019292
• Назва журналу: Ukrainian Journal of Physics

We report about a study of the formation and current transport mechanism of ohmic contacts to n+-InN with electron concentrations of 2×1018, 8×1018, and 4×1019 cm−3. Pd/Ti/Au ohmic contacts are formed by the proposed approach of simultaneous magnetron metal deposition and in-situ temperature anneali...