Оцінювання ефективності введення речовини у відбитий розряд за рахунок розпилювання матеріалу катода
The processes of injection of a sputtered-and-ionized working material into the pulsed reflex discharge plasma have been considered at the initial stage of dense gas-metal plasma formation. A calculation model has been proposed to estimate the parameters of the sputtering mechanism for the required...
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| Date: | 2012 |
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| Main Authors: | , , , |
| Format: | Article |
| Language: | Ukrainian English |
| Published: |
Publishing house "Academperiodika"
2012
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| Subjects: | |
| Online Access: | https://ujp.bitp.kiev.ua/index.php/ujp/article/view/2021185 |
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| Journal Title: | Ukrainian Journal of Physics |