Open Science Harvester of NAS of Ukraine

Deposition of borophosphosilicate glass films using the TEOS–dimethylphosphite–trimethylborate system

by A. S. Turtsevich, O. Y. Nalivaiko
Published 2015

Methods and mechanisms of gettering of silicon structures in the production of integrated circuits

by V. A. Pilipenko, V. A. Gorushko, A. N. Petlitskij, V. V. Ponarjadov, A. S. Turtsevich, S. V. Shvedov
Published 2013

Dependence of the Structural Properties of Ferroelectric SrBi2Ta2O9 Films on the Temperature of Synthesis

by V. V. Sidskij, A. G. Rybakov, A. V. Semchenko, Ju. Osipova, V. V. Kolos, A. S. Turtsevich, A. N. Asadchij
Published 2014

Formation of ickel-platinum silicide layer as a barrier Schottky diodes

by P. V. Kuchinskij, F. F. Komarov, O. V. Milchanin, T. B. Kovaleva, V. A. Solodukha, A. S. Turtsevich, Ja. A. Solovev, S. V. Gaponenko
Published 2014