Open Science Harvester of NAS of Ukraine

Hydrogen reduction of silicon tetrachloride in low temperature non-equilibrium plasma of induction RF discharge

by Deryzemlia, A.N., Yevsiukov, A.I., Radchenko, V.I., Khizhnyak, D.A., Kryshtal, P.G., Zhuravlov, A.Yu., Shijan, A.V., Strigunovskiy, S.V., Pelypets, Yu.A., Shirokov, B.M.
Published in Вопросы атомной науки и техники (2019)

Obtaining silicon carbide via chemical vapor, plasma-chemical and sublimation methods

by Zhuravlov, А.Yu., Hovanskiy, N.А., Khizhnyak, D.A., Shirokov, B.M., Semenov, N.A., Shijan, А.V., Strigunovskiy, S.V., Yevsiukov, A.I., Shevtsov, A.B., Nazarenko, E.A., Pilipenko, N.N.
Published in Вопросы атомной науки и техники (2017)