Optical Recording of Micro- and Nano- Relief Structures on Inorganic Resists Ge-Se

• Datum: 2013
• Hauptverfasser: Indutny, I. Z., Kryuchyn, A. A., Borodin, Yu. A., Danko, V. A., Lukanyuk, M. V., Minko, V. I., Shepelyavyi, P. E., Gera, E. V., Rubish, V. M.
• Format: Artikel
• Sprache: Russian
• Veröffentlicht: Інститут проблем реєстрації інформації НАН України 2013
• Schlagworte: inorganic photo-resist; optical recording; micro-relief structure
• Online Zugang: http://drsp.ipri.kiev.ua/article/view/103416
• Назва журналу: Data Recording, Storage & Processing

The results of experimental studies on recording of microrelief structures using a focused laser radiation with a wavelength of 405 nm to photoresist films of inorganic system Ge-Se have been presented. It is shown that the microrelief structures having depth of 100 nm can be obtained on the inorgan...