Buchumschlag

Optical Recording of Micro- and Nano- Relief Structures on Inorganic Resists Ge-Se

The results of experimental studies on recording of microrelief structures using a focused laser radiation with a wavelength of 405 nm to photoresist films of inorganic system Ge-Se have been presented. It is shown that the microrelief structures having depth of 100 nm can be obtained on the inorgan...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Datum:	2013
Hauptverfasser:	Indutny, I. Z., Kryuchyn, A. A., Borodin, Yu. A., Danko, V. A., Lukanyuk, M. V., Minko, V. I., Shepelyavyi, P. E., Gera, E. V., Rubish, V. M.
Format:	Artikel
Sprache:	Russisch
Veröffentlicht:	Інститут проблем реєстрації інформації НАН України 2013
Schlagworte:	inorganic photo-resist optical recording micro-relief structure
Online Zugang:	https://drsp.ipri.kiev.ua/article/view/103416
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:	Data Recording, Storage & Processing

Institution

Data Recording, Storage & Processing

Ähnliche Einträge

Direct laser writing of microrelief structures on chalcogenide glass by laser beam recorder of master discs
von: Petrov, V. V., et al.
Veröffentlicht: (2020)

The use of chalcogenide glassy semiconductors to create micro- and nanoscale structures
von: Petrov, V. V., et al.
Veröffentlicht: (2020)

Registration Materials for Laser Thermolithography
von: Kryuchyn, A. A., et al.
Veröffentlicht: (2012)

Investigation of micro-seismic phenomena of anthropogenic origin
von: Zdeshchyts, V., et al.
Veröffentlicht: (2015)

A research on the influence of geometry and topology of micro-relief on the formation of angular distribution of radiation in optical diffusers
von: Косяк, І. В.
Veröffentlicht: (2026)

IMAGES MATCHING IN CASE OF SURFACE RELIEF RECONSTRUCTION WITH THE PHOTOCLINOMETRIC METHOD
von: Dulova, I. A., et al.
Veröffentlicht: (2015)

AN IMPROVED PHOTOCLINOMETRY TECHNIQUE FOR SURFACE RELIEF RETRIEVAL FROM IMAGES: ERROR LEVELS FOR HEIGHT AND SLOPE ESTIMATES
von: Dulova, I. A., et al.
Veröffentlicht: (2023)

Mass-spectrometric study of single-walled carbon nanotubes modified by aliphatic amines
von: Gromovoy, Yu., et al.
Veröffentlicht: (2002)

Relief parameters and angular distribution of light intensity for axisymmetric surface homogenizing structures
von: Antonov, E. E., et al.
Veröffentlicht: (2020)

LOCAL HEIGHT CALCULATION ERRORS IN THE PLANET SURFACE RELIEF RETRIEVED FROM IMAGES BY THE IMPROVED PHOTOCLINOMETRY METHOD
von: Dulova, I. A., et al.
Veröffentlicht: (2025)

Low-field electron emission and cathode luminescence of piezoelectric films of oxides and chalcogenides
von: Dadykin, A.A., et al.
Veröffentlicht: (2002)

Spectral and quantum-mechanical study of electronic structure of ultradispersed calcium hydroxyapatite
von: Shpak, A.P., et al.
Veröffentlicht: (2002)

Synthesis of high-temperature superconducting yttrium-barium cuprate single crystals and study of their properties
von: Bakuntseva, M.V., et al.
Veröffentlicht: (2002)

RECENT AND RELIC ACCUMULATIVE RELIEF FORMS IN COASTAL ZONES OF NORTHERN NEAR AZOV SEA TERRITORIES
von: NEPSHA, O. V.
Veröffentlicht: (2012)

Stabilizing small particles of lithium hydroxide with adsorbed water molecules: a quantum chemical study
von: Grebenyuk, A.G.
Veröffentlicht: (2002)

Optical properties of metal-composite-based thin films
von: Gozhenko, V.V., et al.
Veröffentlicht: (2002)

Defect formation in the intermediate layers of YBa₂Cu₃O₇₋δ superconductors depending on oxygen сontents
von: Adonkin, V.T., et al.
Veröffentlicht: (2002)

The impact of low temperature thermal annealing on optical properties of thin composite films
von: Gorbov, I. V., et al.
Veröffentlicht: (2014)

Subthreshold defect formation in YBa₂Cu₃O₇₋δ at nonuniform heating of electron gas in electromagnetic field
von: Adonkin, V.T., et al.
Veröffentlicht: (2002)

Some aspects of mechanical characteristics forming in carbon materials based on exfoliated graphite
von: Sementsov, Yu.I., et al.
Veröffentlicht: (2002)

Electrodynamic properties of matrix dispersed systems with two-layer inclusions
von: Grechko, L.G., et al.
Veröffentlicht: (2002)

Study of water diffusion in lymphocyte membranes from thymus gland and spleen of rats by method of quasi-elastic scattering of slow neutrons
von: Grechko, L.G., et al.
Veröffentlicht: (2002)

MicroRNAs are a key factor in the globalization of tumor-host relationships
von: Chekhun, V.F.
Veröffentlicht: (2023)

Formation of cluster structures on thermoexfoliated graphite by electrochemical method
von: Sidorenko, I.G., et al.
Veröffentlicht: (2002)

Multiscale analysis of micro- and nano-flows
von: A. O. Avramenko
Veröffentlicht: (2017)

The state of effective use of micro-prismatic optical structures for the treatment of children strabismus in Ukraine
von: Солоніна, Н. В., et al.
Veröffentlicht: (2021)

The role of tin in the formation of micro- and nano-structured surfaces of layered Si–Sn–Si films
von: V. B. Neimash, et al.
Veröffentlicht: (2023)

Methodical features of technical and economical assessment about perspectives of local generation development on basis of micro CHP as constituent of power-producing complex
von: Grigoriev R.V.
Veröffentlicht: (2009)

Resolution and Prismatic Effect of Micro-Prism Fresnel Elements
von: Antonov, E. E.
Veröffentlicht: (2013)

REACTIVE POWER CONTROL IN MICRO-GRID NETWORKS USING ADAPTIVE CONTROL
von: Moghayadniya, A., et al.
Veröffentlicht: (2019)

Design Features for Recording Systems of High Density Optical Discs
von: Kosyak, I. V.
Veröffentlicht: (2014)

Obtaining and observation of micro- and nano-size V₂O₅ structures
von: Shevchuk, V.N., et al.
Veröffentlicht: (2010)

Obtaining and observation of micro- and nano-size V₂O₅ structures
von: Shevchuk, V.N., et al.
Veröffentlicht: (2011)

A map of absolute values for gravity fields of Ukraine and some aspects of its possible interpretation
von: Entin, V.A., et al.
Veröffentlicht: (2015)

Double magnetron cluster set-up for synthesis of micro and nano structure coatings
von: Yakovin, S., et al.
Veröffentlicht: (2015)

Optical Properties of Galvanic Series of Matrices for Microrelief Light Reflective Structures
von: Antonov, E. E., et al.
Veröffentlicht: (2013)

Porosity and packing features of nano- and micro-particles of carbon and silica adsorbents
von: V. M. Gun'ko
Veröffentlicht: (2023)

The deep structure of the Greater Caucasus on the basis of geophysical data according to new technologies. 1. Gravimetry, magnetometry, local seismic tomography and micro seismic sounding
von: Ghonghadze, S. A.
Veröffentlicht: (2016)

Investigation of orientation impact on electrical power of bifacial solar elements
von: Wysochin, V. V., et al.
Veröffentlicht: (2021)

THE MICRO- AND NANOSECOND DISCHARGES IN GAS BUBBLES FOR WATER DISINFECTION AND PURIFICATION
von: Boyko, N. I., et al.
Veröffentlicht: (2019)