Ellipsometric control of quality of polished MgF₂ optical ceramics
In this work, ellipsometric measurements were used to optimise the technology of machine working the polished parts made of MgF₂ optical ceramics. The ellipsometry is a high-performance contactless method to control quality of optical surfaces, which is used here due to a sharp response of light pol...
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| Дата: | 2004 |
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| Автори: | , , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2004
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| Назва видання: | Semiconductor Physics Quantum Electronics & Optoelectronics |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/118175 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Ellipsometric control of quality of polished MgF₂ optical ceramics / V.P. Maslov, A.Z. Sarsembaeva, F.F. Sizov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2004. — Т. 7, № 2. — С. 199-201. — Бібліогр.: 9 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
irk-123456789-118175 |
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dspace |
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irk-123456789-1181752017-05-30T03:05:12Z Ellipsometric control of quality of polished MgF₂ optical ceramics Maslov, V.P. Sarsembaeva, A.Z. Sizov, F.F. In this work, ellipsometric measurements were used to optimise the technology of machine working the polished parts made of MgF₂ optical ceramics. The ellipsometry is a high-performance contactless method to control quality of optical surfaces, which is used here due to a sharp response of light polarisation conditions to the properties and parameters of surface and subsurface layers in investigated reflective systems. It is shown that the highly productive technology of diamond polishing provides achievement of ellipsometric parameters at a level of conventional methods of polishing. 2004 Article Ellipsometric control of quality of polished MgF₂ optical ceramics / V.P. Maslov, A.Z. Sarsembaeva, F.F. Sizov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2004. — Т. 7, № 2. — С. 199-201. — Бібліогр.: 9 назв. — англ. 1560-8034 PACS: 81.05.Je http://dspace.nbuv.gov.ua/handle/123456789/118175 en Semiconductor Physics Quantum Electronics & Optoelectronics Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| description |
In this work, ellipsometric measurements were used to optimise the technology of machine working the polished parts made of MgF₂ optical ceramics. The ellipsometry is a high-performance contactless method to control quality of optical surfaces, which is used here due to a sharp response of light polarisation conditions to the properties and parameters of surface and subsurface layers in investigated reflective systems. It is shown that the highly productive technology of diamond polishing provides achievement of ellipsometric parameters at a level of conventional methods of polishing. |
| format |
Article |
| author |
Maslov, V.P. Sarsembaeva, A.Z. Sizov, F.F. |
| spellingShingle |
Maslov, V.P. Sarsembaeva, A.Z. Sizov, F.F. Ellipsometric control of quality of polished MgF₂ optical ceramics Semiconductor Physics Quantum Electronics & Optoelectronics |
| author_facet |
Maslov, V.P. Sarsembaeva, A.Z. Sizov, F.F. |
| author_sort |
Maslov, V.P. |
| title |
Ellipsometric control of quality of polished MgF₂ optical ceramics |
| title_short |
Ellipsometric control of quality of polished MgF₂ optical ceramics |
| title_full |
Ellipsometric control of quality of polished MgF₂ optical ceramics |
| title_fullStr |
Ellipsometric control of quality of polished MgF₂ optical ceramics |
| title_full_unstemmed |
Ellipsometric control of quality of polished MgF₂ optical ceramics |
| title_sort |
ellipsometric control of quality of polished mgf₂ optical ceramics |
| publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| publishDate |
2004 |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/118175 |
| citation_txt |
Ellipsometric control of quality of polished MgF₂ optical ceramics / V.P. Maslov, A.Z. Sarsembaeva, F.F. Sizov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2004. — Т. 7, № 2. — С. 199-201. — Бібліогр.: 9 назв. — англ. |
| series |
Semiconductor Physics Quantum Electronics & Optoelectronics |
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AT maslovvp ellipsometriccontrolofqualityofpolishedmgf2opticalceramics AT sarsembaevaaz ellipsometriccontrolofqualityofpolishedmgf2opticalceramics AT sizovff ellipsometriccontrolofqualityofpolishedmgf2opticalceramics |
| first_indexed |
2023-10-18T20:31:31Z |
| last_indexed |
2023-10-18T20:31:31Z |
| _version_ |
1796150428104130560 |