Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating
For semiconductor structure substrates with film coating disturbances we investigated thermoelastic stresses and their effect on defect production at isothermic heating. A developed mathematical model enables one to optimize the formation and annealing conditions for structures with film coating dis...
Збережено в:
| Дата: | 2000 |
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| Автори: | , |
| Формат: | Стаття |
| Мова: | English |
| Опубліковано: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2000
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| Назва видання: | Semiconductor Physics Quantum Electronics & Optoelectronics |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/121167 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating / O.A. Agueev, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 3. — С. 338-342. — Бібліогр.: 12 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
irk-123456789-121167 |
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dspace |
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irk-123456789-1211672017-06-14T03:03:49Z Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating Agueev, O.A. Svetlichnyi, A.M. For semiconductor structure substrates with film coating disturbances we investigated thermoelastic stresses and their effect on defect production at isothermic heating. A developed mathematical model enables one to optimize the formation and annealing conditions for structures with film coating disturbances during annealing when manufacturing integrated microcircuits. 2000 Article Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating / O.A. Agueev, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 3. — С. 338-342. — Бібліогр.: 12 назв. — англ. 1560-8034 PACS: 61.72.H, 73.40.Q http://dspace.nbuv.gov.ua/handle/123456789/121167 en Semiconductor Physics Quantum Electronics & Optoelectronics Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| description |
For semiconductor structure substrates with film coating disturbances we investigated thermoelastic stresses and their effect on defect production at isothermic heating. A developed mathematical model enables one to optimize the formation and annealing conditions for structures with film coating disturbances during annealing when manufacturing integrated microcircuits. |
| format |
Article |
| author |
Agueev, O.A. Svetlichnyi, A.M. |
| spellingShingle |
Agueev, O.A. Svetlichnyi, A.M. Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating Semiconductor Physics Quantum Electronics & Optoelectronics |
| author_facet |
Agueev, O.A. Svetlichnyi, A.M. |
| author_sort |
Agueev, O.A. |
| title |
Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating |
| title_short |
Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating |
| title_full |
Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating |
| title_fullStr |
Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating |
| title_full_unstemmed |
Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating |
| title_sort |
thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating |
| publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| publishDate |
2000 |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/121167 |
| citation_txt |
Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating / O.A. Agueev, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 3. — С. 338-342. — Бібліогр.: 12 назв. — англ. |
| series |
Semiconductor Physics Quantum Electronics & Optoelectronics |
| work_keys_str_mv |
AT agueevoa thermoelasticstressesanddefectproductioninsemiconductorinsulatorstructuresatisothermicheating AT svetlichnyiam thermoelasticstressesanddefectproductioninsemiconductorinsulatorstructuresatisothermicheating |
| first_indexed |
2023-10-18T20:38:47Z |
| last_indexed |
2023-10-18T20:38:47Z |
| _version_ |
1796150741364113408 |