Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures
We investigated the effect of microwave radiation on absorption spectra (in 400-800 nm range) and curvature radius of SiO₂/SiC structures obtained using traditional thermal oxidation in water vapor at the temperature of 1373 К and rapid thermal annealing in dry oxygen at 1273 К. From an analysis of...
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| Дата: | 2002 |
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| Автори: | , , , , , |
| Формат: | Стаття |
| Мова: | English |
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Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2002
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| Назва видання: | Semiconductor Physics Quantum Electronics & Optoelectronics |
| Онлайн доступ: | http://dspace.nbuv.gov.ua/handle/123456789/121335 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures / Yu.Yu. Bacherikov, R.V. Konakova, E.Yu. Kolyadina, A.N. Kocherov, O.B. Okhrimenko, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2002. — Т. 5, № 4. — С. 391-394. — Бібліогр.: 7 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| id |
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irk-123456789-1213352017-06-15T03:03:23Z Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures Bacherikov, Yu.Yu. Konakova, R.V. Kolyadina, E.Yu. Kocherov, A.N. Okhrimenko, O.B. Svetlichnyi, A.M. We investigated the effect of microwave radiation on absorption spectra (in 400-800 nm range) and curvature radius of SiO₂/SiC structures obtained using traditional thermal oxidation in water vapor at the temperature of 1373 К and rapid thermal annealing in dry oxygen at 1273 К. From an analysis of the sample optical density and radius of curvature variations with total duration of microwave action, we concluded that the structures obtained using rapid thermal annealing are more stable against microwave action. 2002 Article Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures / Yu.Yu. Bacherikov, R.V. Konakova, E.Yu. Kolyadina, A.N. Kocherov, O.B. Okhrimenko, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2002. — Т. 5, № 4. — С. 391-394. — Бібліогр.: 7 назв. — англ. 1560-8034 PACS: 78.70.Fy, 78.70.Gq http://dspace.nbuv.gov.ua/handle/123456789/121335 en Semiconductor Physics Quantum Electronics & Optoelectronics Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| language |
English |
| description |
We investigated the effect of microwave radiation on absorption spectra (in 400-800 nm range) and curvature radius of SiO₂/SiC structures obtained using traditional thermal oxidation in water vapor at the temperature of 1373 К and rapid thermal annealing in dry oxygen at 1273 К. From an analysis of the sample optical density and radius of curvature variations with total duration of microwave action, we concluded that the structures obtained using rapid thermal annealing are more stable against microwave action. |
| format |
Article |
| author |
Bacherikov, Yu.Yu. Konakova, R.V. Kolyadina, E.Yu. Kocherov, A.N. Okhrimenko, O.B. Svetlichnyi, A.M. |
| spellingShingle |
Bacherikov, Yu.Yu. Konakova, R.V. Kolyadina, E.Yu. Kocherov, A.N. Okhrimenko, O.B. Svetlichnyi, A.M. Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures Semiconductor Physics Quantum Electronics & Optoelectronics |
| author_facet |
Bacherikov, Yu.Yu. Konakova, R.V. Kolyadina, E.Yu. Kocherov, A.N. Okhrimenko, O.B. Svetlichnyi, A.M. |
| author_sort |
Bacherikov, Yu.Yu. |
| title |
Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures |
| title_short |
Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures |
| title_full |
Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures |
| title_fullStr |
Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures |
| title_full_unstemmed |
Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures |
| title_sort |
effect of microwave radiation on optical transmission spectra in sio₂/sic structures |
| publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| publishDate |
2002 |
| url |
http://dspace.nbuv.gov.ua/handle/123456789/121335 |
| citation_txt |
Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures / Yu.Yu. Bacherikov, R.V. Konakova, E.Yu. Kolyadina, A.N. Kocherov, O.B. Okhrimenko, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2002. — Т. 5, № 4. — С. 391-394. — Бібліогр.: 7 назв. — англ. |
| series |
Semiconductor Physics Quantum Electronics & Optoelectronics |
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2023-10-18T20:39:12Z |
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